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Soft x-ray platinum-carbon multilayer mirrors

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Abstract

Plane multilayer mirrors 5 cm in diameter and of different 2-D values have been fabricated from polycrystalline platinum and amorphous carbon. The performance of these multilayers at 0.834-nm wavelength has been measured as a function of layer number and thickness. The importance of the commensurate nature of the stack is described with reference to TEM photographs and resistivity measurements.

© 1987 Optical Society of America

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