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Applied Optics

Applied Optics


  • Vol. 26, Iss. 24 — Dec. 15, 1987
  • pp: 5221–5228

Scanning ellipsometer by rotating polarizer and analyzer

L. Y. Chen and David W. Lynch  »View Author Affiliations

Applied Optics, Vol. 26, Issue 24, pp. 5221-5228 (1987)

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A new type of scanning photometric ellipsometer with polarizer and analyzer both rotating synchronously at rotation rates of ω0/2 and ω0 (f0 = 51 Hz), has been designed and constructed. The mechanical and electrical design, alignment, calibration, and error reduction of the system are discussed in detail. Through measuring the amplitudes of the three ac components from the photomultiplier, at frequencies of 51, 102, and 153 Hz, respectively, complex dielectric function spectra have been obtained for test samples of Au and CdTe in the 1.5–5.5-eV range and shown to be in agreement with the results of others.

© 1987 Optical Society of America

Original Manuscript: May 2, 1987
Published: December 15, 1987

L. Y. Chen and David W. Lynch, "Scanning ellipsometer by rotating polarizer and analyzer," Appl. Opt. 26, 5221-5228 (1987)

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