Scanning ellipsometer by rotating polarizer and analyzer
Applied Optics, Vol. 26, Issue 24, pp. 5221-5228 (1987)
http://dx.doi.org/10.1364/AO.26.005221
Acrobat PDF (990 KB)
Abstract
A new type of scanning photometric ellipsometer with polarizer and analyzer both rotating synchronously at rotation rates of ω0/2 and ω0 (ƒ0 = 51 Hz), has been designed and constructed. The mechanical and electrical design, alignment, calibration, and error reduction of the system are discussed in detail. Through measuring the amplitudes of the three ac components from the photomultiplier, at frequencies of 51, 102, and 153 Hz, respectively, complex dielectric function spectra have been obtained for test samples of Au and CdTe in the 1.5–5.5-eV range and shown to be in agreement with the results of others.
© 1987 Optical Society of America
Citation
L. Y. Chen and David W. Lynch, "Scanning ellipsometer by rotating polarizer and analyzer," Appl. Opt. 26, 5221-5228 (1987)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-26-24-5221
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
« Previous Article | Next Article »
OSA is a member of 