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Applied Optics

Applied Optics


  • Vol. 26, Iss. 6 — Mar. 15, 1987
  • pp: 1089–1093

Sinusoidal phase modulating interferometer using the integrating-bucket method

Osami Sasaki, Hirokazu Okazaki, and Makoto Sakai  »View Author Affiliations

Applied Optics, Vol. 26, Issue 6, pp. 1089-1093 (1987)

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We describe a sinusoidal phase modulating interferometer in which a CCD image sensor detects four values by integrating the time-varying intensity in an interference pattern for intervals of one-quarter period of the phase modulation. The optimum amplitude and phase of the sinusoidal phase modulation are determined. The measurement error caused by the additive noise and the deviation from the optimum phase modulation is analyzed. The experimental results for surface profiles of magnetic sliders show that the sinusoidal phase modulating interferometer proposed here yields a measurement accuracy of the order of 1 nm.

© 1987 Optical Society of America

Original Manuscript: July 11, 1986
Published: March 15, 1987

Osami Sasaki, Hirokazu Okazaki, and Makoto Sakai, "Sinusoidal phase modulating interferometer using the integrating-bucket method," Appl. Opt. 26, 1089-1093 (1987)

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