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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 26, Iss. 9 — May. 1, 1987
  • pp: 1647–1653

Ultrahigh accuracy 3-D profilometer

Keiichi Yoshizumi, Tsugio Murao, Jiro Masui, Ryoichi Imanaka, and Yoshihiro Okino  »View Author Affiliations


Applied Optics, Vol. 26, Issue 9, pp. 1647-1653 (1987)
http://dx.doi.org/10.1364/AO.26.001647


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Abstract

An ultrahigh accuracy 3-D profilometer using a laser heterodyne interferometer has been developed. The profiles of aspheric lenses and their molds have been measured. It can measure not only the rectangular coordinates but also the polar coordinates of the surface profile. The measuring accuracy of each of the three axes is 0.01–0.05 μm if the inclination of the investigated surface is less than ±25°. The accuracy of the polar coordinate measurement is also better than 0.05 μm when the inclination of the aspheric surface is less than ±55°. The dynamic range of the X-Y-Z measurement is 40 × 40 × 20 (mm).

© 1987 Optical Society of America

History
Original Manuscript: July 14, 1986
Published: May 1, 1987

Citation
Keiichi Yoshizumi, Tsugio Murao, Jiro Masui, Ryoichi Imanaka, and Yoshihiro Okino, "Ultrahigh accuracy 3-D profilometer," Appl. Opt. 26, 1647-1653 (1987)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-26-9-1647


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References

  1. K. Yoshizumi, Y. Okino, “Precise Measuring System for Aspheric Surfaces,” Kogaku (Jpn. J. Opt.) 12, 450 (1983).
  2. K. Yoshizumi, Y. Okino, “Precise Measuring Method for Aspheric Surfaces Using a Laser Heterodyne Interferometer,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1983), paper FD1.
  3. D. Visser, T. G. Gijsbers, R. A. M. Jorna, “Molds and Measurements for Replicated Aspheric Lenses for Optical Recording,” Appl. Opt. 24, 1848 (1985). [CrossRef] [PubMed]
  4. Y. Fainman, E. Lenz, J. Shamir, “Optical Profilometer: a New Method for High Sensitivity and Wide Dynamic Range,” Appl. Opt. 21, 3200 (1982). [CrossRef] [PubMed]
  5. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980), Chap. 8.
  6. H. Takasaki, N. Umeda, M. Tsukiji, “Stabilized Transverse Zeeman Laser as a New Light Source for Optical Measurement,” Appl. Opt. 19, 435 (1980). [CrossRef] [PubMed]

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