OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 26, Iss. 9 — May. 1, 1987
  • pp: 1647–1653

Ultrahigh accuracy 3-D profilometer

Keiichi Yoshizumi, Tsugio Murao, Jiro Masui, Ryoichi Imanaka, and Yoshihiro Okino  »View Author Affiliations

Applied Optics, Vol. 26, Issue 9, pp. 1647-1653 (1987)

View Full Text Article

Enhanced HTML    Acrobat PDF (964 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



An ultrahigh accuracy 3-D profilometer using a laser heterodyne interferometer has been developed. The profiles of aspheric lenses and their molds have been measured. It can measure not only the rectangular coordinates but also the polar coordinates of the surface profile. The measuring accuracy of each of the three axes is 0.01–0.05 μm if the inclination of the investigated surface is less than ±25°. The accuracy of the polar coordinate measurement is also better than 0.05 μm when the inclination of the aspheric surface is less than ±55°. The dynamic range of the X-Y-Z measurement is 40 × 40 × 20 (mm).

© 1987 Optical Society of America

Original Manuscript: July 14, 1986
Published: May 1, 1987

Keiichi Yoshizumi, Tsugio Murao, Jiro Masui, Ryoichi Imanaka, and Yoshihiro Okino, "Ultrahigh accuracy 3-D profilometer," Appl. Opt. 26, 1647-1653 (1987)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. Yoshizumi, Y. Okino, “Precise Measuring System for Aspheric Surfaces,” Kogaku (Jpn. J. Opt.) 12, 450 (1983).
  2. K. Yoshizumi, Y. Okino, “Precise Measuring Method for Aspheric Surfaces Using a Laser Heterodyne Interferometer,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1983), paper FD1.
  3. D. Visser, T. G. Gijsbers, R. A. M. Jorna, “Molds and Measurements for Replicated Aspheric Lenses for Optical Recording,” Appl. Opt. 24, 1848 (1985). [CrossRef] [PubMed]
  4. Y. Fainman, E. Lenz, J. Shamir, “Optical Profilometer: a New Method for High Sensitivity and Wide Dynamic Range,” Appl. Opt. 21, 3200 (1982). [CrossRef] [PubMed]
  5. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980), Chap. 8.
  6. H. Takasaki, N. Umeda, M. Tsukiji, “Stabilized Transverse Zeeman Laser as a New Light Source for Optical Measurement,” Appl. Opt. 19, 435 (1980). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited