Heterodyne interferometry with a frequency-modulated laser diode
Applied Optics, Vol. 27, Issue 1, pp. 124-128 (1988)
http://dx.doi.org/10.1364/AO.27.000124
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Abstract
A digital phase measuring interferometer with a frequency-modulated laser diode using the integratedbucket technique is described. The injection current is continuously changed to introduce a time- varying phase difference between the two beams of an unbalanced Twyman-Green interferometer. The intensity of the interference patterns is integrated with a CCD array sensor for intervals of one-quarter period of the fringe. Using the intensity data a microcomputer calculates the phase to be detected. Some experimental results with the interferometer are presented; the rms repeatability obtained was λ/80.
© 1988 Optical Society of America
Citation
Jun Chen, Yukihiro Ishii, and Kazumi Murata, "Heterodyne interferometry with a frequency-modulated laser diode," Appl. Opt. 27, 124-128 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-1-124
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