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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 14 — Jul. 15, 1988
  • pp: 3039–3045

Effect of spurious reflection on phase shift interferometry

Chiayu Ai and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 27, Issue 14, pp. 3039-3045 (1988)
http://dx.doi.org/10.1364/AO.27.003039


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Abstract

The phase errors caused by spurious reflection in Twyman-Green and Fizeau interferometers are studied. A practical algorithm effectively eliminating the error is presented. Two other algorithms are reviewed, and the results obtained using the three algorithms are compared.

© 1988 Optical Society of America

History
Original Manuscript: January 15, 1988
Published: July 15, 1988

Citation
Chiayu Ai and James C. Wyant, "Effect of spurious reflection on phase shift interferometry," Appl. Opt. 27, 3039-3045 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-14-3039

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