Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Effect of spurious reflection on phase shift interferometry

Not Accessible

Your library or personal account may give you access

Abstract

The phase errors caused by spurious reflection in Twyman-Green and Fizeau interferometers are studied. A practical algorithm effectively eliminating the error is presented. Two other algorithms are reviewed, and the results obtained using the three algorithms are compared.

© 1988 Optical Society of America

Full Article  |  PDF Article
More Like This
Effects of birefringence on Fizeau interferometry that uses a polarization phase-shifting technique

Chunyu Zhao, Dongyel Kang, and James H. Burge
Appl. Opt. 44(35) 7548-7553 (2005)

Effect of retroreflection on a Fizeau phase-shifting interferometer

Chiayu Ai and James C. Wyant
Appl. Opt. 32(19) 3470-3478 (1993)

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi
Appl. Opt. 54(13) 4207-4213 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (28)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved