The phase errors caused by spurious reflection in Twyman-Green and Fizeau interferometers are studied. A practical algorithm effectively eliminating the error is presented. Two other algorithms are reviewed, and the results obtained using the three algorithms are compared.
© 1988 Optical Society of America
Original Manuscript: January 15, 1988
Published: July 15, 1988
Chiayu Ai and James C. Wyant, "Effect of spurious reflection on phase shift interferometry," Appl. Opt. 27, 3039-3045 (1988)