OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 18 — Sep. 15, 1988
  • pp: 3779–3781

Verification of momentum transfer as the dominant densifying mechanism in ion-assisted deposition

James D. Targove and H. Angus Macleod  »View Author Affiliations


Applied Optics, Vol. 27, Issue 18, pp. 3779-3781 (1988)
http://dx.doi.org/10.1364/AO.27.003779


View Full Text Article

Enhanced HTML    Acrobat PDF (771 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

No abstract available.

History
Original Manuscript: November 30, 1987
Published: September 15, 1988

Citation
James D. Targove and H. Angus Macleod, "Verification of momentum transfer as the dominant densifying mechanism in ion-assisted deposition," Appl. Opt. 27, 3779-3781 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-18-3779


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. P. J. Martin, R. P. Netterfield, “Optical Films Produced by Ion-Based Processes,” Prog. Opt. 23, Chap. 3 (1986). [CrossRef]
  2. K.-H. Muller, “Monte Carlo Calculation for Structural Modifications in Ion-Assisted Thin Films Deposition Due to Thermal Spikes,” J. Vac. Sci. Technol. A 4, 184 (1986). [CrossRef]
  3. K.-H. Muller, “Model for Ion-Assisted Thin Films Densification,” J. Appl. Phys. 59, 2803 (1986). [CrossRef]
  4. J. D. Targove, J. P. Lehan, L. J. Lingg, H. A. Macleod, J. A. Leavitt, L. C. Mclntyre, “Ion-Assisted Deposition of Lanthanum Fluoride Thin Films,” Appl. Opt. 26, 3733 (1987). [CrossRef] [PubMed]
  5. J. D. Targove, L. J. Lingg, J. P. Lehan, H. A. Macleod, “Effect of Oxygen Incorporation on the Structure of Ion-Beam-Assisted LaF3 Thin Films,” Appl. Opt. 27, 213 (1988). [CrossRef] [PubMed]
  6. J. C. Manifacier, J. Gasiot, J. P. Fillard, “A Simple Method for the Determination of the Optical Constants n,k and the Thickness of a Weakly Absorbing Thin Film,” J. Phys. E 9, 1002 (1976). [CrossRef]
  7. H. A. Macleod, “Structure-Related Optical Properties of Thin Films,” J. Vac. Sci. Technol. A 4, 418 (1986). [CrossRef]
  8. S. Ogura, “Some Features of the Behaviour of Optical Thin Films,” Ph.D. Thesis, Newcastle on Tyne Polytechnic (1975).
  9. F. Seitz, J. S. Koehler, “Displacement of Atoms during Irradiation,” Solid State Phys. 2, 307 (1956).
  10. K. Kinosita, M. Nishibori, “Porosity of MgF2 Films—Evaluation Based on Changes in Refractive Index due to Adsorption of Vapors,” J. Vac. Sci. Technol. 6, 730 (1969). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited