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Applied Optics

Applied Optics


  • Vol. 27, Iss. 18 — Sep. 15, 1988
  • pp: 3779–3781

Verification of momentum transfer as the dominant densifying mechanism in ion-assisted deposition

James D. Targove and H. Angus Macleod  »View Author Affiliations

Applied Optics, Vol. 27, Issue 18, pp. 3779-3781 (1988)

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Original Manuscript: November 30, 1987
Published: September 15, 1988

James D. Targove and H. Angus Macleod, "Verification of momentum transfer as the dominant densifying mechanism in ion-assisted deposition," Appl. Opt. 27, 3779-3781 (1988)

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  1. P. J. Martin, R. P. Netterfield, “Optical Films Produced by Ion-Based Processes,” Prog. Opt. 23, Chap. 3 (1986). [CrossRef]
  2. K.-H. Muller, “Monte Carlo Calculation for Structural Modifications in Ion-Assisted Thin Films Deposition Due to Thermal Spikes,” J. Vac. Sci. Technol. A 4, 184 (1986). [CrossRef]
  3. K.-H. Muller, “Model for Ion-Assisted Thin Films Densification,” J. Appl. Phys. 59, 2803 (1986). [CrossRef]
  4. J. D. Targove, J. P. Lehan, L. J. Lingg, H. A. Macleod, J. A. Leavitt, L. C. Mclntyre, “Ion-Assisted Deposition of Lanthanum Fluoride Thin Films,” Appl. Opt. 26, 3733 (1987). [CrossRef] [PubMed]
  5. J. D. Targove, L. J. Lingg, J. P. Lehan, H. A. Macleod, “Effect of Oxygen Incorporation on the Structure of Ion-Beam-Assisted LaF3 Thin Films,” Appl. Opt. 27, 213 (1988). [CrossRef] [PubMed]
  6. J. C. Manifacier, J. Gasiot, J. P. Fillard, “A Simple Method for the Determination of the Optical Constants n,k and the Thickness of a Weakly Absorbing Thin Film,” J. Phys. E 9, 1002 (1976). [CrossRef]
  7. H. A. Macleod, “Structure-Related Optical Properties of Thin Films,” J. Vac. Sci. Technol. A 4, 418 (1986). [CrossRef]
  8. S. Ogura, “Some Features of the Behaviour of Optical Thin Films,” Ph.D. Thesis, Newcastle on Tyne Polytechnic (1975).
  9. F. Seitz, J. S. Koehler, “Displacement of Atoms during Irradiation,” Solid State Phys. 2, 307 (1956).
  10. K. Kinosita, M. Nishibori, “Porosity of MgF2 Films—Evaluation Based on Changes in Refractive Index due to Adsorption of Vapors,” J. Vac. Sci. Technol. 6, 730 (1969). [CrossRef]

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