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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 22 — Nov. 15, 1988
  • pp: 4626–4630

Surface inspection via projection interferometry

Roger W. Wygant, Silverio P. Almeida, and Oliverio D. D. Soares  »View Author Affiliations


Applied Optics, Vol. 27, Issue 22, pp. 4626-4630 (1988)
http://dx.doi.org/10.1364/AO.27.004626


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Abstract

Projection fringe interferometry provides a useful technique for nondestructive surface analysis. Two beam interferometric fringes were projected onto a block of aluminum whose surface had various types of grooves cut into it. The fringes were digitized and analyzed via an automatic fringe tracking algorithm. Three-dimensional topographical maps of the surface’s microstructure are presented together with a statistical analysis of surface parameters including average roughness, height distributions, and the autocorrelation function.

© 1988 Optical Society of America

History
Original Manuscript: March 17, 1988
Published: November 15, 1988

Citation
Roger W. Wygant, Silverio P. Almeida, and Oliverio D. D. Soares, "Surface inspection via projection interferometry," Appl. Opt. 27, 4626-4630 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-22-4626


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References

  1. S. H. Rowe, W. T. Welford, “Surface Topography of Nonoptical Surfaces by Projected Interference Fringes,” Nature London 216, 786 (1967). [CrossRef]
  2. W. T. Welford, “Some Applications of Projected Interference Fringes,” Opt. Acta 16, 331 (1969).
  3. S. H. Rowe, “Projected Interference Fringes in Holographic Interferometry,” J. Opt. Soc. Am. 61, 1599 (1971). [CrossRef]
  4. A. J. MacGovern, “Projected Fringes and Holography,” Appl. Opt. 11, 2972 (1972). [CrossRef] [PubMed]
  5. K. Leonhardt, “The Interference of Two Obliquely Intersecting Beams,” Optik 41, 344 (1974).
  6. O. D. D. Soares, “Non-optical Surface Topography by Projected Interference Fringes,” Port. Phys. 13, 217 (1982).
  7. O. D. D. Soares, S. P. Almeida, “Projection Interference Microscope,” Proc. Soc. Photo-Opt. Instrum. Eng. 429, 32 (1983).
  8. S. P. Almeida, R. W. Wygant, L. M. Bernardo, O. D. D. Soares, “Analysis of Microscopic Surfaces by Projection Interference Fringes,” J. Opt. Soc. Am. A 3(13), P42 (1986).
  9. R. W. Wygant, S. P. Almeida, O. D. D. Soares, “Surface Microtopography by Automated Processing of Projected Interference Fringes,” Proc. Soc. Photo-Opt. Instrum. Eng. 42, 863 (1987).
  10. R. W. Wygant, S. P. Almeida, O. D. D. Soares, “Surface Micro-Metrology by Image Processing of Patterns from Collimated Interference Fringe Illumination,” in OPTICS-ECOOSA, Birmingham, U.K., 22–25 Mar. 1988.
  11. S. P. Almeida, R. W. Wygant, O. D. D. Soares, “Automatic Surface Analysis with Fringe Projection,” Proc. Soc. Photo-Opt. Instrum. Eng. 08, 952 (1988).
  12. N. George, “About Speckle,” Proc. Soc. Photo-Opt. Instrum. Eng. 5, 153 (1983).

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