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Applied Optics

Applied Optics


  • Vol. 27, Iss. 22 — Nov. 15, 1988
  • pp: 4638–4644

Range sensing based on shearing interferometry

Gerd Häusler, J. Hutfless, Manfred Maul, and Hans Weissmann  »View Author Affiliations

Applied Optics, Vol. 27, Issue 22, pp. 4638-4644 (1988)

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We report an optical range sensor that combines the advantages of focus sensing and interferometry. It works for specularly reflecting objects and for diffusely reflecting objects. The sensor is simple, robust against vibrations, and has high depth resolution. The aperture is very small, hence the sensor is small and minimizes shading problems. The sensor is based on the following principle: A light spot is projected onto the object under test. The radius of the wave that is scattered at the object is measured with high accuracy by shearing interferometry.

© 1988 Optical Society of America

Original Manuscript: March 17, 1988
Published: November 15, 1988

Gerd Häusler, J. Hutfless, Manfred Maul, and Hans Weissmann, "Range sensing based on shearing interferometry," Appl. Opt. 27, 4638-4644 (1988)

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