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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 22 — Nov. 15, 1988
  • pp: 4676–4683

Use of optical scattering to characterize dislocations in semiconductors

B. L. Sopori  »View Author Affiliations


Applied Optics, Vol. 27, Issue 22, pp. 4676-4683 (1988)
http://dx.doi.org/10.1364/AO.27.004676


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Abstract

Optical scattering from a defect-etched semiconductor sample is used to characterize dislocations in material. It is shown that when the sample is illuminated normally with a He–Ne (λ = 6328-Å)laser beam reflection pattern can be used to identify the shapes of the etch pits and hence the directions of the dislocation propagation. The integrated light flux scattered by the illuminated sample, normalized by the incident is shown to be proportional to the dislocation density. This principle is applied in two ways to dislocations at the sample surface. In one case the defect-etched sample is scanned under a light beam, the scattered flux is collected by an integrating sphere and measured. In the second case the defect-sample is illuminated with incoherent light of a broad angular spectrum, and a photographic transparency produced which registers an image of the dislocation density distribution of the original sample. These methods for counting dislocations, mapping dislocation distribution, and measuring average dislocation density of the sample are discussed.

© 1988 Optical Society of America

History
Original Manuscript: March 19, 1988
Published: November 15, 1988

Citation
B. L. Sopori, "Use of optical scattering to characterize dislocations in semiconductors," Appl. Opt. 27, 4676-4683 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-22-4676


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References

  1. H. E. Bennett, J. O. Porteus, “Relation Between Roughness and Specular Reflectance at Normal Incidence,” J. Opt. Soc. Am. 51, 123 (1961). [CrossRef]
  2. A. L. Wertheimer, W. L. Wilcock, “Light Scattering Measurements of Particle Distributions,” Appl. Opt. 15, 1616 (1976). [CrossRef] [PubMed]
  3. P. Roche, E. Pelletier, “Characterization of Optical Surfaces by Measurement of Scattering Distribution,” Appl. Opt. 23, 3561 (1984). [CrossRef] [PubMed]
  4. B. L. Sopori, “A New Defect Etch for Polycrystalline Silicon,” J. Electrochem. Soc. 131, 667 (1984). [CrossRef]
  5. B. L. Sopori, “The Principle of Dislocation Analysis by Coherent Optical Scattering from a Defect-Etched Surface,” J. Electrochem. Soc. 135, 2601 (1988). [CrossRef]
  6. E. L. O’Neil, Introduction to Statistical Optics (Addison-Wesley, Reading, MA, 1963), Chap. 7.

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