A study of the major deposition parameters including source material, oxygen partial pressure, substrate temperature, and deposition rate affecting the optical quality of electron beam evaporated TiO2 films is presented. After careful optimization of these parameters it is possible to reproducibly deposit TiO2 films from TiO2 source material mixed with 5% CeO2 at an oxygen partial pressure of 5 × 10-5 Torr, a substrate temperature of 320°C, and a deposition rate of 2 Å/s.
© 1988 Optical Society of America
Hans W. Lehmann and K. Frick, "Optimizing deposition parameters of electron beam evaporated TiO2 films," Appl. Opt. 27, 4920-4924 (1988)