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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 24 — Dec. 15, 1988
  • pp: 5082–5089

Accuracy of phase shifting interferometry

K. Kinnstaetter, Adolf W. Lohmann, Johannes Schwider, and Norbert Streibl  »View Author Affiliations


Applied Optics, Vol. 27, Issue 24, pp. 5082-5089 (1988)
http://dx.doi.org/10.1364/AO.27.005082


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Abstract

The accuracy of phase shifting interferometers is impaired by mechanical drifts and vibrations, intensity variations, nonlinearities of the photoelectric detection device, and, most seriously, by inaccuracies of the reference phase shifter. The phase shifting procedure enables the detection of most of the errors listed above by a special Lissajous display technique described here. Furthermore, it is possible to correct phase shifter inaccuracies by using an iterative process relying solely on the interference pattern itself and the Fourier sums used in phase shifting interferometry.

© 1988 Optical Society of America

History
Original Manuscript: June 24, 1988
Published: December 15, 1988

Citation
K. Kinnstaetter, Adolf W. Lohmann, Johannes Schwider, and Norbert Streibl, "Accuracy of phase shifting interferometry," Appl. Opt. 27, 5082-5089 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-24-5082


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References

  1. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, D. J. Brangaccio, “Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses,” Appl. Opt. 13, 2693 (1974). [CrossRef] [PubMed]
  2. J. C. Wyant, “Interferometric Optical Metrology: Basic Principles and New Systems,” Laser Focus (May1982), p. 65.
  3. J. C. Wyant, K. Creath, “Recent Advances in Interferometric Optical Testing,” Laser Focus/Elect. Opt. (Nov.1985), p. 118.
  4. B. S. Fritz, “Absolute Calibration of an Optical Flat,” Opt. Eng. 23, 379 (1984). [CrossRef]
  5. J. C. Wyant, C. L. Koliopoulos, B. Bushan, D. Basila, “Development of a 3-D Noncontact Digital Optical Profiler,” J. Trib. 108, 1 (1986). [CrossRef]
  6. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, “Digital Wave-Front Measuring Interferometry: Some Systematic Error Sources,” Appl. Opt. 22, 3421 (1983). [CrossRef] [PubMed]
  7. C. L. Koliopoulos, “Interferometric Optical Phase Measurement Techniques,” Ph.D. Thesis, U. Arizona (1981).
  8. P. Carre, “Installation et utilisation du comparateur photoélectrique et interférentiel du Bureau International des Poids et Mesures,” Metrologia 2, 13 (1966). [CrossRef]
  9. Y.-Y. Cheng, J. C. Wyant, “Phase Shifter Calibration in Phase-Shifting Interferometry,” Appl. Opt. 24, 3049 (1985). [CrossRef] [PubMed]
  10. K. A. Stetson, W. R. Brohinsky, “Electrooptic Holography and Its Applications to Hologram Interferometry,” Appl. Opt. 24, 3631 (1985). [CrossRef] [PubMed]
  11. J. J. Snyder, “Algorithm for Fast Digital Analysis of Interference Fringes,” Appl. Opt.’ 19, 1223 (1980). [CrossRef] [PubMed]

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