The accuracy of phase shifting interferometers is impaired by mechanical drifts and vibrations, intensity variations, nonlinearities of the photoelectric detection device, and, most seriously, by inaccuracies of the reference phase shifter. The phase shifting procedure enables the detection of most of the errors listed above by a special Lissajous display technique described here. Furthermore, it is possible to correct phase shifter inaccuracies by using an iterative process relying solely on the interference pattern itself and the Fourier sums used in phase shifting interferometry.
© 1988 Optical Society of America
Original Manuscript: June 24, 1988
Published: December 15, 1988
K. Kinnstaetter, Adolf W. Lohmann, Johannes Schwider, and Norbert Streibl, "Accuracy of phase shifting interferometry," Appl. Opt. 27, 5082-5089 (1988)