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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 3 — Feb. 1, 1988
  • pp: 480–485

Estimation of a planar microlens by oblique ray tracing

Shigeyoshi Misawa and Kenichi Iga  »View Author Affiliations


Applied Optics, Vol. 27, Issue 3, pp. 480-485 (1988)
http://dx.doi.org/10.1364/AO.27.000480


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Abstract

Ray tracing for a planar microlens by solving a ray equation is performed. Off-axial dependence of spot size and wave aberration of fabricated planar microlens samples are estimated. A typical spherical aberration of the present planar microlenses at N.A. = 0.3 was 1.1λ. The curvature field was −0.7λ, and comatic aberration was 0.3λ for a tilted angle of 5° at 0.3 N.A. It was estimated that the field curvature and comatic aberration were dominant next to the spherical aberration.

© 1988 Optical Society of America

History
Original Manuscript: March 31, 1987
Published: February 1, 1988

Citation
Shigeyoshi Misawa and Kenichi Iga, "Estimation of a planar microlens by oblique ray tracing," Appl. Opt. 27, 480-485 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-3-480

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