Abstract

Holograms of resolution test masks have been recorded in photoresist using visible and ultraviolet lasers. Reconstructed images have been projected onto and recorded in photoresist by lithography. Speckle-free submicron resolution has been achieved using simple and inexpensive optical systems and using lasers with limited coherence. Using these techniques with excimer lasers single-shot recording with exposure time of ~20 ns and multishot reconstruction with exposure time ≤1 s are possible for image fields up to 10 cm in diameter.

© 1988 Optical Society of America

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