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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 8 — Apr. 15, 1988
  • pp: 1503–1507

Extreme ultraviolet reflectance degradation of aluminum and silicon from surface oxidation

Marion L. Scott, Paul N. Arendt, Bernard J. Cameron, John M. Saber, and Brian E. Newnam  »View Author Affiliations


Applied Optics, Vol. 27, Issue 8, pp. 1503-1507 (1988)
http://dx.doi.org/10.1364/AO.27.001503


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Abstract

We have performed in situ oxide contamination and XUV reflectance vs angle of incidence studies on fresh aluminum and silicon films evaporated in an ultrahigh vacuum system (base pressure 2 × 10−10 Torr). Our ellipsometric measurements indicate that a surface monolayer of oxide forms on aluminum (1 h at 2 × 10−8-Torr oxygen) and silicon (1 h at 10−7-Torr oxygen). The monolayer formation time is inversely proportional to oxygen pressure. Our reflectance vs angle of incidence measurements at 58.4-nm wavelength indicate that unoxidized aluminum and silicon coatings can be used as multifacet retroreflectors with net retroreflectances in excess of 75% for aluminum and 50% for silicon.

© 1988 Optical Society of America

History
Original Manuscript: September 25, 1987
Published: April 15, 1988

Citation
Marion L. Scott, Paul N. Arendt, Bernard J. Cameron, John M. Saber, and Brian E. Newnam, "Extreme ultraviolet reflectance degradation of aluminum and silicon from surface oxidation," Appl. Opt. 27, 1503-1507 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-8-1503


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References

  1. D. T. Atwood, “Short Wavelength Optics for Future Free Electron Lasers,” AIP Conf. Proc. 118, 294 (1984). [CrossRef]
  2. M. L. Scott, P. N. Arendt, B. J. Cameron, B. E. Newnam, D. Windt, W. Cash, “Extreme Ultraviolet Multilayer Reflectors,” AIP Conf. Proc. 147, 260 (1986). [CrossRef]
  3. E. D. Johnson, S. L. Hulbert, R. F. Garrett, G. P. Williams, M. L. Knotek, “In Situ Reactive Glow Discharge Cleaning of X-Ray Optical Surfaces,” Rev. Sci. Instrum. 58, 1042 (1987). [CrossRef]
  4. M. L. Scott, P. N. Arendt, B. J. Cameron, R. Cordi, B. E. Newnam, D. Windt, W. Cash, “Metal Reflectors in the EUV,” Proc. Soc. Photo-Opt. Instrum. Eng. 691, 20 (1986).
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  8. E. D. Palik, Ed., Handbook of Optical Constants of Solids (Academic, Orlando, FL, 1985).
  9. M. L. Scott, P. N. Arendt, B. J. Cameron, B. E. Newnam, “Contamination Layers on EUV Reflectors,” Proc. Soc. Photo-Opt. Instrum. Eng. 733, 156 (1987).
  10. B. E. Newnam, “Multifaceted Metal Mirror Designs for Soft X-Ray and EUV Free Electron Laser Resonators,” in Laser Induced Damage in Optical Materials: 1985, H. E. Bennett, A. H. Gunther, D. Milam, B. E. Newnam, Eds., NBS Spec. Pub. (1987), to be published.
  11. H. J. Hagemann, W. Gudat, C. Kunz, “Optical Constants from the Far Infrared to the X-Ray Region: Mg, Al, Cu, Ag, Au, Bi, C, and A1203,” DESY SR Report 74/7 (1974).

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