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Applied Optics

Applied Optics


  • Vol. 27, Iss. 8 — Apr. 15, 1988
  • pp: 1508–1517

Grazing incidence optics: amplitude-wavelength mapping as a unified approach to specification, theory, and metrology

A. Franks, B. Gale, and M. Stedman  »View Author Affiliations

Applied Optics, Vol. 27, Issue 8, pp. 1508-1517 (1988)

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The concept of amplitude-wavelength space applied to the development of an x-ray optic provides a means of summarizing and unifying the complex data associated with each stage of its development: the specification; manufacturing tolerances; and metrology. The determination of manufacturing tolerances requires calculation of the image aberrations of perturbed optical systems and is most usefully carried out using a modified asymptotic Debye theory. Its range of applicability and that of other theories is illustrated in amplitude-wavelength space. Subnanometer perturbations are measured by mechanical or optical techniques, and the measuring instruments are calibrated by means of x-ray interferometry in terms of the primary standards of length.

© 1988 Optical Society of America

Original Manuscript: August 18, 1987
Published: April 15, 1988

A. Franks, B. Gale, and M. Stedman, "Grazing incidence optics: amplitude-wavelength mapping as a unified approach to specification, theory, and metrology," Appl. Opt. 27, 1508-1517 (1988)

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