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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 27, Iss. 8 — Apr. 15, 1988
  • pp: 1548–1557

Surface correlation function analysis of high resolution scattering data from mirrored surfaces obtained using a triple-axis x-ray diffractometer

Finn E. Christensen, A. Hornstrup, and Herbert W. Schnopper  »View Author Affiliations


Applied Optics, Vol. 27, Issue 8, pp. 1548-1557 (1988)
http://dx.doi.org/10.1364/AO.27.001548


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Abstract

Within various x-ray programs there exists a need for a detailed investigation of the surface roughness of mirrored surfaces over a wide spatial wavelength bandwidth, ranging from large scale figure error to microroughness. A number of methods exist to measure the surface roughness. Common to all methods is that they are bandwidth-limited. A crucial point in the analysis of data is, therefore, to specify accurately the wavelength bandwidth limitation and to determine the surface autocorrelation function within this bandwidth. We present a number of scattering measurements obtained using a triple-axis perfect-crystal x-ray diffractometer and the results of an autocorrelation function analysis. Furthermore, we present some measurements of integrated reflectivity, which we believe provide evidence for microroughness in the range from a few angstroms to tens of microns.

© 1988 Optical Society of America

History
Original Manuscript: August 18, 1987
Published: April 15, 1988

Citation
Finn E. Christensen, A. Hornstrup, and Herbert W. Schnopper, "Surface correlation function analysis of high resolution scattering data from mirrored surfaces obtained using a triple-axis x-ray diffractometer," Appl. Opt. 27, 1548-1557 (1988)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-27-8-1548

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