The near- and far-field performance of three practical positive branch unstable resonator designs was compared for a commercial excimer laser operating on ArF and KrF. Atmospheric attenuation at 193 and 248 nm was measured.
© 1988 Optical Society of America
Original Manuscript: September 8, 1987
Published: May 1, 1988
Terrence J. McKee and Gary T. Boyd, "Performance comparison of positive branch unstable resonator cavities for excimer lasers," Appl. Opt. 27, 1840-1843 (1988)