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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 11 — Jun. 1, 1989
  • pp: 1972–1974

Calibration requirements for Mirau and Linnik microscope interferometers

James F. Biegen  »View Author Affiliations


Applied Optics, Vol. 28, Issue 11, pp. 1972-1974 (1989)
http://dx.doi.org/10.1364/AO.28.001972


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Abstract

In interference microscopes requiring oblique incidence illumination (i.e., Michelson, Mirau, and Linnik), the fringe spacing varies with illumination numerical aperture so that calibration is needed for accurate measurements.

© 1989 Optical Society of America

History
Original Manuscript: April 17, 1989
Published: June 1, 1989

Citation
James F. Biegen, "Calibration requirements for Mirau and Linnik microscope interferometers," Appl. Opt. 28, 1972-1974 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-11-1972

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