OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 11 — Jun. 1, 1989
  • pp: 1972–1974

Calibration requirements for Mirau and Linnik microscope interferometers

James F. Biegen  »View Author Affiliations


Applied Optics, Vol. 28, Issue 11, pp. 1972-1974 (1989)
http://dx.doi.org/10.1364/AO.28.001972


View Full Text Article

Enhanced HTML    Acrobat PDF (795 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

In interference microscopes requiring oblique incidence illumination (i.e., Michelson, Mirau, and Linnik), the fringe spacing varies with illumination numerical aperture so that calibration is needed for accurate measurements.

© 1989 Optical Society of America

History
Original Manuscript: April 17, 1989
Published: June 1, 1989

Citation
James F. Biegen, "Calibration requirements for Mirau and Linnik microscope interferometers," Appl. Opt. 28, 1972-1974 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-11-1972


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956). [CrossRef]
  2. C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956). [CrossRef]
  3. J. W. Gates, “Correspondence: Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 507 (1956). [CrossRef]
  4. G. Trumpold, “Interference Method of Measuring the Roughness of a Surface,” Izmer. Tekh. 6, 34–36 (1971).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited