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Applied Optics

Applied Optics


  • Vol. 28, Iss. 11 — Jun. 1, 1989
  • pp: 1972–1974

Calibration requirements for Mirau and Linnik microscope interferometers

James F. Biegen  »View Author Affiliations

Applied Optics, Vol. 28, Issue 11, pp. 1972-1974 (1989)

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In interference microscopes requiring oblique incidence illumination (i.e., Michelson, Mirau, and Linnik), the fringe spacing varies with illumination numerical aperture so that calibration is needed for accurate measurements.

© 1989 Optical Society of America

Original Manuscript: April 17, 1989
Published: June 1, 1989

James F. Biegen, "Calibration requirements for Mirau and Linnik microscope interferometers," Appl. Opt. 28, 1972-1974 (1989)

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  1. F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956). [CrossRef]
  2. C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956). [CrossRef]
  3. J. W. Gates, “Correspondence: Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 507 (1956). [CrossRef]
  4. G. Trumpold, “Interference Method of Measuring the Roughness of a Surface,” Izmer. Tekh. 6, 34–36 (1971).

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