Calibration requirements for Mirau and Linnik microscope interferometers
Applied Optics, Vol. 28, Issue 11, pp. 1972-1974 (1989)
http://dx.doi.org/10.1364/AO.28.001972
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Abstract
In interferencem icroscopesr equiringo blique incidence illumination (i.e., Michelson, Mirau, and Linnik), the fringe spacing varies with illumination numerical aperture so that calibration is needed for accurate measurements.
© 1989 Optical Society of America
Citation
James F. Biegen, "Calibration requirements for Mirau and Linnik microscope interferometers," Appl. Opt. 28, 1972-1974 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-11-1972
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