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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 14 — Jul. 15, 1989
  • pp: 2723–2730

Description of a scattering apparatus: application to the problems of characterization of opaque surfaces

C. Amra, C. Grezes-Besset, P. Roche, and Emile Pelletier  »View Author Affiliations


Applied Optics, Vol. 28, Issue 14, pp. 2723-2730 (1989)
http://dx.doi.org/10.1364/AO.28.002723


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Abstract

We show how the complexity of a micropolished optical surface can be investigated in detail by measurement of the distribution of scattered light. We deal with problems of roughness anisotropy and uniformity together with cleaning problems. Experimental results concern numerous black glasses from different polishing shops and allow a determination of the polish inhomogeneity in a same glass set. After that, we present a detailed study of the apparatus function of the scatterometer, and we determine the limits of validity of our optical characterization method.

© 1989 Optical Society of America

History
Original Manuscript: July 18, 1988
Published: July 15, 1989

Citation
C. Amra, C. Grezes-Besset, P. Roche, and Emile Pelletier, "Description of a scattering apparatus: application to the problems of characterization of opaque surfaces," Appl. Opt. 28, 2723-2730 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-14-2723

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