Data obtained from reflectance and transmittance measurements are used to determine the extinction coefficient. We show that accuracy is limited by the substrate quality and interface roughnesses of the layer.
© 1989 Optical Society of America
Jean-Pierre Borgogno and Emile Pelletier, "Determination of the extinction coefficient of dielectric thin films from spectrophotometric measurements," Appl. Opt. 28, 2895-2901 (1989)