Reflectance measurements made on an Fe film over a wide range of angles of incidence are curve-fitted to extract the optical constants n and k. Problems with surface oxide layers are eliminated by making the reflectance measurements through the substrate. The experimental uncertainties of n and k are determined by a rigorous χ2 analysis. The experimentally determined optical constants are found to be considerably larger than values found in the literature.
© 1989 Optical Society of America
Original Manuscript: July 1, 1988
Published: July 15, 1989
Merritt N. Deeter and Dror Sarid, "Determination of optical constants by angle scanning reflectometry," Appl. Opt. 28, 2911-2913 (1989)