We show how we can measure with accuracy the distribution law of thicknesses deposited inside a vacuum chamber. These measurement techniques are applied to the simultaneous production of high rejection narrowband multiple halfwave Fabry-Perot filters. To prevent any alteration of the filters’ optical properties, we must control the variations vs time of the evaporant distribution.
© 1989 Optical Society of America
C. Grezes-Besset, R. Richier, and Emile Pelletier, "Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters," Appl. Opt. 28, 2960-2964 (1989)