Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters
Applied Optics, Vol. 28, Issue 14, pp. 2960-2964 (1989)
http://dx.doi.org/10.1364/AO.28.002960
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Abstract
We show how we can measure with accuracy the distribution law of thicknesses deposited inside a vacuum chamber. These measurement techniques are applied to the simultaneous production of high rejection narrowband multiple halfwave Fabry-Perot filters. To prevent any alteration of the filters’ optical properties, we must control the variations vs time of the evaporant distribution.
© 1989 Optical Society of America
Citation
C. Grezes-Besset, R. Richier, and Emile Pelletier, "Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters," Appl. Opt. 28, 2960-2964 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-14-2960
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