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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 14 — Jul. 15, 1989
  • pp: 2960–2964

Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters

C. Grezes-Besset, R. Richier, and Emile Pelletier  »View Author Affiliations


Applied Optics, Vol. 28, Issue 14, pp. 2960-2964 (1989)
http://dx.doi.org/10.1364/AO.28.002960


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Abstract

We show how we can measure with accuracy the distribution law of thicknesses deposited inside a vacuum chamber. These measurement techniques are applied to the simultaneous production of high rejection narrowband multiple halfwave Fabry-Perot filters. To prevent any alteration of the filters’ optical properties, we must control the variations vs time of the evaporant distribution.

© 1989 Optical Society of America

History
Original Manuscript: July 28, 1988
Published: July 15, 1989

Citation
C. Grezes-Besset, R. Richier, and Emile Pelletier, "Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters," Appl. Opt. 28, 2960-2964 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-14-2960


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References

  1. C. Grezes-Besset, C. Amra, B. Cousin, G. Otrio, E. Pelletier, R. Richier, “Etude de la diaphonie d’un système de démultiplex-age par filtres interférentiels. Conséquences de la diffusion de la lumière par les irrégularités des surfaces optiques,” Ann. Tele-commun. 43, Nos. 3–4, 135–141 (1988).
  2. P. Bousquet, A. Fornier, R. Kowalczyk, E. Pelletier, P. Roche, “Optical Filters: Monitoring Process Allowing the Auto-Correction of Thickness Errors,” Thin Solid Films 13, 285–290 (1972); H. A. Macleod, “Turning Value Monitoring of Narrow-Band All-Dielectric Thin-Film Optical Filters,” Opt. Acta 19, 1–28 (1972). [CrossRef]
  3. A. Fornier, R. Richier, E. Pelletier, B. Bovard, G. Salvini, “Coritrôle optique du dépôt de couches multidiélectriques quart d’onde: techniques hybrides de traitement du signal utilisées pour améliorer les performances,” Ann. Telecommun. 42, 140–148 (1987).
  4. A. Fornier, R. Richier, E. Pelletier, “Realization of Fabry-Perot Filters for Wavelength Demultiplexing,” Proc. Soc. Photo-Opt. Instrum. Eng. 652, 27–32 (1986).
  5. E. Pelletier, R. Kowalczyk, A. Fornier, “Influence du procede de controle sur les tolerances de realisation des filtres interferentiels a bande etroite,” Opt. Acta 20, 509–526 (1973); H. A. Macleod, “Thin Film Narrow Band Optical Filters,” Thin Solid Films 34, 335–342 (1976). [CrossRef]
  6. E. Pelletier, “Les couches minces au service de l’interféromètre de Fabry-Perot,” J. Opt. 17, 43–52 (1986). [CrossRef]
  7. L. Holland, W. Steckelmacher, “The Distribution of Thin Films Condensed on Surfaces by the Vacuum Evaporation Method,” Vacuum 2, 346–364 (1952); K. H. Behrndt, “Film-Thickness and Deposition-Rate Monitoring Devices and Techniques for Producing Films of Uniform Thickness,” Phys. Thin Films 3, 1–59 (1966). [CrossRef]
  8. J. P. Borgogno, B. Lazarides, E. Pelletier, “Automatic Determination of the Optical Constants of Inhomogeneous Thin Films,” Appl. Opt. 21, 4020–4029 (1982). [CrossRef] [PubMed]
  9. H. A. Macleod, D. Richmond, “The Effect of Errors in the Optical Monitoring of Narrow-Band All Dielectric Thin Optical Filters,” Opt. Acta 21, 429–443 (1974). [CrossRef]

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