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Applied Optics

Applied Optics


  • Vol. 28, Iss. 15 — Aug. 1, 1989
  • pp: 2984–2986

Multilayer-coated blazed grating performance in the soft x-ray region

Jack C. Rife, William R. Hunter, Troy W. Barbee, Jr., and R. G. Cruddace  »View Author Affiliations

Applied Optics, Vol. 28, Issue 15, pp. 2984-2986 (1989)

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Useful grating efficiences for a variety of new spectrometer types have been attained. These results are discussed.

© 1989 Optical Society of America

Original Manuscript: May 8, 1989
Published: August 1, 1989

Jack C. Rife, William R. Hunter, Troy W. Barbee, and R. G. Cruddace, "Multilayer-coated blazed grating performance in the soft x-ray region," Appl. Opt. 28, 2984-2986 (1989)

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  1. T. W. Barbee, “Combined Microstucture X-Ray Optics; Multilayer Diffraction Gratings,” Mater. Res. Soc. Symp. Proc. 103, 307–314 (1988). [CrossRef]
  2. T. W. Barbee, “Use of Multilayer Diffraction Gratings in the Determination of X-Ray, Soft X-Ray, and VUV Elemental Scattering Cross-Sections,” Proc. Soc. Photo-Opt. Instrum. Eng. 911, 169–176 (1988); T. W. Barbee, “Application of Multilayer Structures to the Determination of Optical Constants in the X-Ray, Soft X-Ray, and Extreme Ultraviolet Spectral Ranges,” Mater. Res. Soc. Symp. Proc. (1988), to be published. [CrossRef]
  3. T. W. Barbee, “Combined Microstructure X-Ray Optics,” Rev. Sci. Instrum. (1989), to be published. [CrossRef]
  4. J. C. Rife, “Applications of Layered Synthetic Microstructures in Vacuum Ultraviolet and Soft X-Ray Grating Spectrometers,” NRL Memorandum Report6278 (1988), to be published.
  5. R. A. M. Keski-Kuha, “Layered Synthetic Microstructure Technology Considerations for the Extreme Ultraviolet,” Appl. Opt. 23, 3534–3537 (1984). [CrossRef] [PubMed]
  6. A. M. Hawryluk, N. M. Ceglio, D. G. Stearns, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “Soft X-Ray Beamsplitters and Highly Dispersive Multilayer Mirrors for Use as Soft X-Ray Laser Cavity Components,” Proc. Soc. Photo-Opt. Instrum. Eng. 688, 81–90 (1986).
  7. W. Jark, “Enhancement of Diffraction Grating Efficiencies in the Soft X-Ray Region by a Multilayer Coating,” Opt. Commun. 65, 201–205 (1986). [CrossRef]
  8. W. R. Hunter, J. C. Rife, “An Ultrahigh Vacuum Reflectometer/Goniometer for Use with Synchrotron Radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986). [CrossRef]
  9. J. C. Rife, W. R. Hunter, R. T. Williams, “Features and Initial Performance Tests of the Grating/Crystal Monochromator,” Nucl. Instrum. Methods A 246, 252–255 (1982); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and Recent Performance of the Grating/Crystal Monochromator,” Rev. Sci. Instrum. (1989), to be published. [CrossRef]
  10. Optical constants were derived from the following reference: B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro, B. K. Fugikawa, “Low Energy X-Ray Interaction Coefficients: Photoabsorption, Scattering, and Reflection,” Atomic and Nuclear Data Tables 27, 1–144 (1982). [CrossRef]
  11. D. R. Ciarlo, D. E. Miller, “Silicon Diffraction Gratings for Multilayer Structures,” Proc. Soc. Photo-Opt. Instrum. Eng. 688, 163–170 (1986).

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