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Applied Optics

Applied Optics


  • Vol. 28, Iss. 18 — Sep. 15, 1989
  • pp: 3889–3892

Phase shifting interferometry: reference phase error reduction

Johannes Schwider  »View Author Affiliations

Applied Optics, Vol. 28, Issue 18, pp. 3889-3892 (1989)

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The accuracy of phase shifting interferometry is limited by reference phase errors caused by nonlinearities in the phase shifter movements, calibration errors of this device, phase drifts during the measuring interval, and low frequency mechanical vibrations. Since the error depends on the phase to be measured in a sinusoidal fashion one can greatly reduce its influence on the measuring results. For this purpose a function also containing the characteristic error function, is fitted to the measured data. In a second step the error function is subtracted from the measured phase values. In most cases an error reduction by 1 order of magnitude seems achievable as has been demonstrated by computer simulations.

© 1989 Optical Society of America

Original Manuscript: January 18, 1989
Published: September 15, 1989

Johannes Schwider, "Phase shifting interferometry: reference phase error reduction," Appl. Opt. 28, 3889-3892 (1989)

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