OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 18 — Sep. 15, 1989
  • pp: 3997–4005

Investigation of the evaporation process conditions on the optical constants of zirconia films

J. A. Dobrowolski, P. D. Grant, R. Simpson, and A. J. Waldorf  »View Author Affiliations


Applied Optics, Vol. 28, Issue 18, pp. 3997-4005 (1989)
http://dx.doi.org/10.1364/AO.28.003997


View Full Text Article

Enhanced HTML    Acrobat PDF (1290 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Deposition parameters required for producing zirconia films for use in optical multilayer systems by electron-beam gun evaporation of zirconia and zirconium starting materials were investigated. The optical constants were determined as a function of distance, partial pressure of oxygen, and angle of incidence. The direct and reactive evaporation processes yielded ZrO2 films with refractive indices of 2.08 and 2.14, respectively, for vapor incident on the substrate at normal incidence.

© 1989 Optical Society of America

History
Original Manuscript: January 3, 1989
Published: September 15, 1989

Citation
J. A. Dobrowolski, P. D. Grant, R. Simpson, and A. J. Waldorf, "Investigation of the evaporation process conditions on the optical constants of zirconia films," Appl. Opt. 28, 3997-4005 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-18-3997


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. A. Dobrowolski, S. H. Lewis, M. Ranger, A. Waldorf, R. L. Wilkinson, “Design of a Prototype Semi-Continuous Roll Coater for Optical Multilayers,” Proc. Soc. Photo-Opt. Instrum. Eng. 325, 40–45 (1982).
  2. W. T. Pawlewicz, D. D. Hays, “Microstructure Control for Sputter-Deposited ZrO2, ZrO2.CaO and Zr02.Y2O3,” Thin Solid Films 94, 31–45 (1982). [CrossRef]
  3. C. M. Gilmore, C. Quinn, E. F. Skelton, C. R. Gossett, S. B. Qadri, “Stabilized Zirconia-Alumina Thin Films,” J. Vac. Sci. Technol. A 4, 2598–2600 (1986). [CrossRef]
  4. K. S. Fancey, A. Matthews, “Ionization Assisted Physical Vapour Deposition of Zirconia Thermal Barrier Coatings,” J. Vac. Sci. Technol. A 4, 2656–2660 (1986). [CrossRef]
  5. M. Croset, P. Schnell, G. Velasco, J. Siejka, “Study of Calcia-Stabilized Zirconia Thin-Film Sensors,” J. Vac. Sci. Technol. 14, 777–781 (1977). [CrossRef]
  6. M. Croset, L. M. Mercandalli, J. Siejka, “Calcia-Stabilized Zirconia Thin Films in GaAs Metal/Insulator/Semiconductor Technology: Reduction of GaAs Native Oxide,” Thin Solid Films 103, 221–242 (1983). [CrossRef]
  7. T. L. Barr, L. B. Welsh, F. R. Szofran, J. E. Greene, R. E. Klinger, “Surface Studies of Y2O3-Doped CeO2 and ZrO2 Thin Films,” J. Vac. Sci. Technol. 15, 341–342 (1978). [CrossRef]
  8. T. Hisaki, G. Negishi, S. Watanabe, H. Kashiwagi, “Excimer Laser Mirror,” J. Vac. Soc. Jpn. 21, 365–371 (1988). [CrossRef]
  9. T. K. Stefaniak, “Use of Zirconium Dioxide Multilayer Dielectric Coatings for the Ultraviolet and Visible Spectrum,” Opt. Appl. 10, 445–450 (1980).
  10. K. V. S. R. Apparao, N. K. Sahoo, T. C. Bagchi, “Low Loss ZrO2 Films for Optical Applications in the UV Region,” Thin Solid Films 129, L71–L73 (1985). [CrossRef]
  11. K. V. S. R. Apparao, N. K. Sahoo, T. C. Bagchi, “Optical Constants of ZrO2 Films in the UV Region,” Ind. J. Phys. 60A, 216–223 (1986).
  12. D. L. Wood, K. Nassan, “Refractive Index of Cubic Zirconia Stabilized with Yttria,” Appl. Opt. 21, 2978–2981 (1982). [CrossRef] [PubMed]
  13. V. P. Povoshchenko, N. G. Kostyuchenko, T. I. Demidovich, Ya. V. Petlitskaya, Zh. P. Trofimova, V. M. Kholodov, “Application of a Mathematical Statistical Method to the Optimization of Conditions for the Deposition of Vacuum Optical Coatings,” Sov. J. Opt. Technol. 52, 221–223 (1985).
  14. E. Ritter, “Optical Film Materials and their Applications,” Appl. Opt. 15, 2318–2327 (1976). [CrossRef] [PubMed]
  15. R. E. Klinger, C. K. Carniglia, “Optical and Crystalline Inhomogeneity in Evaporated Zirconia Films,” Appl. Opt. 24, 3184–3187 (1985). [CrossRef] [PubMed]
  16. F. Stetter, R. Esselborn, N. Harder, M. Friz, P. Tolles, “Materials for Optical Thin Films,” Appl. Opt. 15, 2315–2317 (1976). [CrossRef] [PubMed]
  17. E. E. Khawaja, S. G. Tomlin, “The Optical Properties of Thin Films of Tantalum Pentoxide and Zirconium Dioxide,” Thin Solid Films 30, 361–369 (1975). [CrossRef]
  18. H. K. Pulker, “Characterization of Optical Thin Films,” Appl. Opt. 18, 1969–1977 (1979). [CrossRef] [PubMed]
  19. M. Balog, M. Schieber, M. Michman, S. Patai, “The Chemical Vapour Deposition and Characterization of ZrO2 Films from Organometallic Compounds,” Thin Solid Films 47, 109–120 (1977). [CrossRef]
  20. E. N. Farabaugh, D. M. Sanders, “Microstructure of Dielectric Thin Films Formed by e-Beam Coevaporation,” J. Vac. Sci. Technol. A 1, 356–359 (1983). [CrossRef]
  21. A. Feldman, E. N. Farabaugh, W. K. Haller, D. M. Sanders, R. A. Stempniak, “Modifying Structure and Properties of Optical Films by Coevaporation,” J. Vac. Sci. Technol. A4, 2969– 2974 (1986).
  22. P. J. Martin, H. A. Macleod, R. P. Netterfield, C. G. Pacey, W. G. Sainty, “Ion-Beam-Assisted Deposition of Thin Films,” Appl. Opt. 22, 178–184 (1983). [CrossRef] [PubMed]
  23. P. J. Martin, R. P. Netterfield, W. G. Sainty, G. J. Clark, W. A. Lanford, S. H. Sie, “Ion-Assisted Deposition of Bulklike ZrO2 Films,” Appl. Phys. Lett. 43, 711–713 (1983). [CrossRef]
  24. P. J. Martin, R. P. Netterfield, W. G. Sainty, “Modification of the Optical and Structural Properties of Dielectric ZrO2 Films by Ion-Assisted Deposition,” J. Appl. Phys. 55, 235–241 (1984). [CrossRef]
  25. P. J. Martin, R. P. Netterfield, W. G. Sainty, C. G. Pacey, “The Preparation and Characterization of Optical Thin Films Produced by Ion-Assisted Deposition,” J. Vac. Sci. Technol. A2, 341–345 (1984).
  26. K.-H. Muller, “Model for Ion-Assisted Thin-Film Densification,” J. Appl. Phys. 59, 2803–2807 (1986). [CrossRef]
  27. K.-H. Muller, R. P. Netterfield, P. J. Martin, “Dynamics of Zirconium Oxide Thin-Film Growth and Ion-Beam Etching,” Phys. Rev. B 35, 2934–2941 (1987). [CrossRef]
  28. J. A. Dobrowolski, F. C. Ho, D. Menagh, R. Simpson, A. Waldorf, “Transparent, Conducting Indium Tin Oxide Films Formed on Low or Medium Temperature Substrates by Ion-Assisted Deposition,” Appl. Opt. 26, 5204–5210 (1987). [CrossRef] [PubMed]
  29. R. Blickensderfer, R. L. Lincoln, P. A. Romans, “Reactive Sputtering of Zirconium with Oxygen,” Thin Solid Films 37, L73–L75 (1976). [CrossRef]
  30. H. Sankur, J. DeNatale, W. Gunning, J. G. Nelson, “Dense Crystalline ZrO2 Thin Films Deposited by Pulsed-Laser Evaporation,” J. Vac. Sci. Technol. A 5, 2869–2874 (1987). [CrossRef]
  31. H. K. Pulker, M. Buhler, R. Hora, K. H. Guenther, “Reactive Ion Plating Deposition of Sui Generis Optical Coatings,” in Technical Digest, Annual Meeting of the Optical Society of America (Optical Society of America, Washington, DC, 1987), p. 115.
  32. D. P. Arndt et al., “Multiple Determination of the Optical Constants of Thin-Film Coating Materials,” Appl. Opt. 23, 3571–3596 (1984). [CrossRef] [PubMed]
  33. G. A. Muranova, E. I. Fodeeva, A. F. Perveev, “Dependance of the Index of Refraction and Microporosity of Zirconium Dioxide Films on the Deposition Conditions,” Sov. J. Opt. Technol. 44, 682–683 (1977).
  34. H. Taguchi, Y. Takahashi, C. Matsumoto, “Optical Properties of Thin Films of Zirconium Dioxide,” J. Appl. Phys. 19, 1417–1418 (1980). [CrossRef]
  35. D. Smith, P. Baumeister, “Refractive Index of Some Oxide and Fluoride Coating Materials,” Appl. Opt. 18, 111–115 (1979). [CrossRef] [PubMed]
  36. L. Holland, W. Steckelmacher, “The Distribution of Thin Films Condensed on Surfaces by the Vacuum Evaporation Method,” Vacuum 2, 346–364 (1952). [CrossRef]
  37. N. M. Bashara, Y.-K. Eng, “Optical Properties of Zircaloy and Zircaloy Oxide by Ellipsometry,” App. Opt. 19, 3245–3251 (1980). [CrossRef]
  38. Gmelin's Handbuch der Anorganischen Chemie, Vol. 42, p. 208

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited