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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 18 — Sep. 15, 1989
  • pp: 3997–4005

Investigation of the evaporation process conditions on the optical constants of zirconia films

J. A. Dobrowolski, P. D. Grant, R. Simpson, and A. J. Waldorf  »View Author Affiliations


Applied Optics, Vol. 28, Issue 18, pp. 3997-4005 (1989)
http://dx.doi.org/10.1364/AO.28.003997


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Abstract

Deposition parameters required for producing zirconia films for use in optical multilayer systems by electron-beam gun evaporation of zirconia and zirconium starting materials were investigated. The optical constants were determined as a function of distance, partial pressure of oxygen, and angle of incidence. The direct and reactive evaporation processes yielded ZrO2 films with refractive indices of 2.08 and 2.14, respectively, for vapor incident on the substrate at normal incidence.

© 1989 Optical Society of America

History
Original Manuscript: January 3, 1989
Published: September 15, 1989

Citation
J. A. Dobrowolski, P. D. Grant, R. Simpson, and A. J. Waldorf, "Investigation of the evaporation process conditions on the optical constants of zirconia films," Appl. Opt. 28, 3997-4005 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-18-3997

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