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Applied Optics

Applied Optics


  • Vol. 28, Iss. 18 — Sep. 15, 1989
  • pp: 4017–4023

Interference effects in the Raman scattering intensity from thin films

M. Ramsteiner, C. Wild, and J. Wagner  »View Author Affiliations

Applied Optics, Vol. 28, Issue 18, pp. 4017-4023 (1989)

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Exact theoretical expressions including absorption, multiple reflections, and interference effects are derived for the intensity of Raman scattering from thin films. A concept of interference enhanced Raman scattering is presented based on a two-layer configuration that has been verified experimentally by Raman scattering measurements on thin amorphous hydrogenated carbon films deposited on crystalline Si substrates. It is shown how the model can be generalized to describe the Raman scattering intensity for a sample layer inside a multilayer structure.

© 1989 Optical Society of America

Original Manuscript: February 6, 1989
Published: September 15, 1989

M. Ramsteiner, C. Wild, and J. Wagner, "Interference effects in the Raman scattering intensity from thin films," Appl. Opt. 28, 4017-4023 (1989)

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  1. W. Richter, “Resonant Raman Scattering in Semiconductors,” Solid State Physics, G. Höhler, E. A. Niekisch, Eds. (Springer-Verlag, Berlin1976), pp. 121–272. [CrossRef]
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  9. See, e.g., H. A. Macleod, in Thin-film optical filters (Adam Hilger Ltd., Bristol, 1986). However we have chosen another possible definition of the phase, nrkdr, instead of −nrkdr. [CrossRef]
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  13. C. Wild, J. Wagner, P. Koidl, “Process Monitoring of a–C:H Plasma Deposition,” J. Vac. Sci. Technol. A5, 2227–2230 (1987).
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  17. See, e.g., J. Wagner, M. Ramsteiner, C. Wild, P. Koidl, “Characterization of a–C:H films by Raman and Luminescence Spectroscopy,” in Proc. of the European Materials Research Society Vol. XVII; Amorphous Hydrogenated Carbon Films, P. Koidl, P. Oelhafen, Eds. (Les Editons de Physique, Paris, 1987) and references therein.
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  19. D. E. Aspnes, A. A. Studna, “Dielectric Functions and Optical Parameters of Si, Ge, GaP, GaAs, GaSb, InP, InAs, and InSb from 1.5 to 6.0 eV,” Phys. Rev. B27, 985–1009 (1983).
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  21. J. Wagner, M. Ramsteiner, C. Wild, P. Koidl, “Resonant Raman Scattering of Amorphous Carbon and Polycrystalline Diamond Films,” to appear in Phys. Rev. B, July15,1989. [CrossRef]

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