Three replica gratings were made from a single master; two were epoxy overcoated with different thicknesses of gold, and one was replicated directly in gold. Their performance in EUV light at grazing incidence angles was measured and compared.
© 1989 Optical Society of America
Anne Miller, Patrick Jelinsky, Stuart Bowyer, and Barry Y. Welsh, "Small blaze angle gratings with various surface treatments for use in the extreme ultraviolet," Appl. Opt. 28, 4971-4973 (1989)