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Applied Optics

Applied Optics


  • Vol. 28, Iss. 4 — Feb. 15, 1989
  • pp: 778–784

Photolithographic fabrication method of computer-generated holographic interferograms

Markus Kajanto, Eero Byckling, Juha Fagerholm, Jussi Heikonen, Jari Turunen, Antti Vasara, and Arto Salin  »View Author Affiliations

Applied Optics, Vol. 28, Issue 4, pp. 778-784 (1989)

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We consider the fabrication of high-quality interferogram-type diffractive optical elements with conventional photolithographic techniques and compare the results with those achievable with electron-beam lithography. The fringes associated with the phase transfer function of the binary phase holographic interferogram are approximated with rectangles, which can be realized at submicron accuracy using a pattern generator and step-and-repeat camera. The effects of the rectangle quantization are analyzed both numerically and experimentally with the aid of diffraction patterns produced by simple focusing elements. Both resolution and diffraction efficiency of the best holograms approach their theoretical values.

© 1989 Optical Society of America

Original Manuscript: January 11, 1988
Published: February 15, 1989

Markus Kajanto, Eero Byckling, Juha Fagerholm, Jussi Heikonen, Jari Turunen, Antti Vasara, and Arto Salin, "Photolithographic fabrication method of computer-generated holographic interferograms," Appl. Opt. 28, 778-784 (1989)

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  1. W-H. Lee, “Computer-Generated Holograms: Techniques and Applications,” Prog. Opt. 16, 119 (1978). [CrossRef]
  2. K. A. Winick, J. R. Fienup, “Optimum Holographic Elements Recorded with Nonspherical Wave Fronts,” J. Opt. Soc. Am. 73, 208 (1983). [CrossRef]
  3. M. R. Feldman, C. C. Guest, “Computer Generated Holographic Optical Elements for Optical Interconnection of Very Large Scale Integrated Circuits,” Appl. Opt. 26, 4377 (1987). [CrossRef] [PubMed]
  4. H. Dammann, E. Klotz, “Coherent Optical Generation and Inspection of Two-Dimensional Periodic Structures,” Opt. Acta 24, 505 (1977). [CrossRef]
  5. W-H. Lee, “Method for Converting a Gaussian Laser Beam into a Uniform Beam,” Opt. Commun. 36, 469 (1981). [CrossRef]
  6. A. J. Macgovern, J. C. Wyant, “Computer Generated Holograms for Testing Optical Elements,” Appl. Opt. 10, 619 (1971). [CrossRef] [PubMed]
  7. D. Casasent, “Computer-Generated Holograms in Pattern Recognition,” Opt. Eng. 24, 724 (1985). [CrossRef]
  8. A. J. Lee, D. P. Casasent, “Computer Generated Hologram Recording Using a Laser Printer,” Appl. Opt. 26, 136 (1987). [CrossRef] [PubMed]
  9. E. Hasman, A. A. Friesem, M. Nagler, R. Fogel, “Holographic Optical Elements for the Far IR Radiation,” in Abstracts, OPTICS-ECOOSA ’88, Birmingham, U.K. (22–25 Mar. 1988), p. 152.
  10. S. Arnold, “Electron Beam Fabrication of Computer-Generated Holograms,” Opt. Eng. 24, 803 (1985). [CrossRef]
  11. H. Buczek, J. M. Teijido, “Application of Electron-Beam Lithography at CSEM for Fabricating Computer-Generated Holograms,” Proc. Soc. Photo-Opt. Instrum. Eng. 884, 46 (1988).
  12. J. Lague, “Fabrication of Binary Optics Using Electron Beam Lithography,” Proc. Soc. Photo-Opt. Instrum. Eng. 884, 95 (1988).
  13. J. Fagerholm, J. Turunen, E. Byckling, “Optimization of Holographic Optical Systems by Damped Least Squares and Wavefront Matching Techniques,” Proc. Soc. Photo-Opt. Instrum. Eng. 883, 20 (1988).
  14. J. Turunen, A. Vasara, J. Westerholm, G. Jin, A. Salin, “Optimization and Fabrication of Grating Beamsplitters,” J. Phys. D 21, 5102 (1988); see also J. Turunen, A. Vasara, G. Jin, “Optimization and Photolithographic Fabrication of Computer-Generated Holographic Beamsplitters,” in Abstracts, OPTICS-ECOOSA ’88, Birmingham, U.K. (22–25 Mar. 1988), p. 158. [CrossRef]
  15. C. L. Chen, T. R. Osborne, “Quantization Effects on the Fields of Electron-Beam Generated Cylindrical Zone Plates,” Appl. Opt. 26, 2342 (1987). [CrossRef] [PubMed]
  16. P. Burggraaf, “Stepper Lens Options for VLSI,” Semicond. Int. 11, 44 (Feb.1988).
  17. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).
  18. NAG Reference Manual, Numerical Algorithms Group Mark II.
  19. J. N. Cederquist, J. R. Fienup, A. M. Tai, “CGH Fabrication Techniques and Facilities,” Proc. Soc. Photo-Opt. Instrum. Eng. 884, 40 (1988).
  20. M. Nakase, “Potential of Optical Lithography,” Opt. Eng. 26, 319 (1987). [CrossRef]

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