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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 28, Iss. 7 — Apr. 1, 1989
  • pp: 1382–1386

Thickness and refractive index dispersion measurement in a thin film using the Haidinger interferometer

Elisabeth A. de Oliveira and Jaime Frejlich  »View Author Affiliations


Applied Optics, Vol. 28, Issue 7, pp. 1382-1386 (1989)
http://dx.doi.org/10.1364/AO.28.001382


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Abstract

A Haidinger interferometer setup was adapted for accurate measurement of thickness and refractive index dispersion in transparent films using some spectral lines of a commercial argon-ion laser. Experimental results are reported and compared with those from other available methods.

© 1989 Optical Society of America

History
Original Manuscript: March 25, 1988
Published: April 1, 1989

Citation
Elisabeth A. de Oliveira and Jaime Frejlich, "Thickness and refractive index dispersion measurement in a thin film using the Haidinger interferometer," Appl. Opt. 28, 1382-1386 (1989)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-7-1382


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References

  1. D. Malacara, Optical Shop Testing (Wiley, New York, 1975).
  2. M. Françon, Optical Interferometry (Academic, New York, 1966), p. 260.
  3. G. L. Bourdet, A. G. Orszag, “Absolute Distance Measurements by CO2 Laser Multiwavelength Interferometry,” Appl. Opt. 18, 225 (1979). [CrossRef] [PubMed]
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  5. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975), p. 95.
  6. Spectra Physics Catalog for High Power Ion Lasers (Spectra-Physics, Laser Products Division, 1250 W. Middlefield Road, Mountain View, CA 94042, 1977), pp. 22–23.
  7. F. Abeles, “La determination de l’indice et de l’épaisseur des couches minces transparentes,” J. Phys. Radium 11, 310 (1950). [CrossRef]
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  9. A. M. Goodman, “Optical Interference Method for the Approximate Determination of Refractive Index and Thickness of a Transparent Layer,” Appl. Opt. 17, 2779 (1978). [CrossRef] [PubMed]
  10. M. D. Silver, E. T. K. Chow, “Thickness Measurement of Thin Permalloy Films: Comparison of X-Ray Emission Spectroscopy, Interferometry and Stylus Methods,” J. Vac. Sci. Technol. 2, 203 (1965). [CrossRef]
  11. P. H. Berning, “Theory and Calculations of Optical Thin Films,” Phys. Thin Films 1, 69 (1963).

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