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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 15 — May. 20, 1990
  • pp: 2307–2310

Laser annealing of Corning 7059 glass waveguides

Mool C. Gupta, Thomas Strasser, and Robert Bellman  »View Author Affiliations


Applied Optics, Vol. 29, Issue 15, pp. 2307-2310 (1990)
http://dx.doi.org/10.1364/AO.29.002307


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Abstract

Corning 7059 glass thin film waveguides prepared by rf sputtering and vapor deposition were annealed with a CO2 laser at various powers and scan velocities. Some reduction in optical loss was observed after laser annealing of the films. The results show a reduction in optical loss with the number of laser scans. Optical profilometer measurements indicated no change in surface roughness after laser annealing. RBS analysis of laser annealed samples show no change in elemental composition. We discuss possible optical loss reduction mechanisms and present data on the marking of thin films when annealing is done at higher CO2 laser powers.

© 1990 Optical Society of America

History
Original Manuscript: November 9, 1989
Published: May 20, 1990

Citation
Mool C. Gupta, Thomas Strasser, and Robert Bellman, "Laser annealing of Corning 7059 glass waveguides," Appl. Opt. 29, 2307-2310 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-15-2307


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References

  1. S. Dutta, H. E. Jackson, J. T. Boyd, “Reduction of Scattering from a Glass Thin-Film Optical Waveguide by CO2 Laser Annealing,” Appl. Phys. Lett. 37, 512–514 (1980). [CrossRef]
  2. S. Dutta, H. E. Jackson, J. T. Boyd, “Extremely Low-Loss Glass Thin-Film Optical Waveguides Utilizing Surface Coating and Laser Annealing,” J. Appl. Phys. 52, 3873–3875 (1981). [CrossRef]
  3. S. Dutta, H. E. Jackson, J. T. Boyd, “Use of Laser Annealing to Achieve Low Loss in Corning 7059 Glass, ZnO, Si3N4, Nb2O5, and Ta2O5 Optical Thin Film Waveguides,” Proc. Soc. Photo-Opt. Instrum. Eng. 321, 23–28 (1982).
  4. S. Dutta, H. E. Jackson, J. T. Boyd, “Use of Laser Annealing to Achieve Low Loss in Corning 7059 Glass, ZnO, Si3N4, Nb2O5, and Ta2O5 Optical Thin-Film Waveguides,” Opt. Eng. 22, 117–120 (1983). [CrossRef]
  5. S. Dutta, H. E. Jackson, J. T. Boyd, C. W. White, “Rutherford Backscattering Evidence for Solid Phase Laser Annealing of Corning 7059 Glass and ZnO Thin Films,” J. Appl. Phys. 54, 2125–2126 (1983). [CrossRef]
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  8. W. C. Borland, D. E. Zelmon, C. J. Radens, J. T. Boyd, H. E. Jackson, “Properties of Four-Layer Planar Optical Waveguides Near Cutoff,” IEEE J. Quantum Electron. QE-23, 1172–1179 (1987). [CrossRef]
  9. M. Gupta, “Low-Optical-Loss Glass Thin Films,” paper submitted to Appl. Opt.
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