OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 29, Iss. 18 — Jun. 20, 1990
  • pp: 2755–2759

Fabrication of microlenses by laser chemical vapor deposition

Miyuki Kubo and Mitsugu Hanabusa  »View Author Affiliations

Applied Optics, Vol. 29, Issue 18, pp. 2755-2759 (1990)

View Full Text Article

Enhanced HTML    Acrobat PDF (686 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A new laser-based method was developed for fabrication of microlenses on flat quartz plates. In this method, a CO2 laser is used to heat a quartz surface and induce thermal reactions for source gases of SiH4 and NO. Even as-grown silicon oxide deposits have the spherical thickness distribution required for a lens at the center and this useful area can be further increased by wet etching. Microlenses were checked on a Fizeau interferometer for surface accuracy and aberrations. As a demonstration, a 14-μm thick microlens was used for collimating light from an optical fiber.

© 1990 Optical Society of America

Original Manuscript: July 27, 1989
Published: June 20, 1990

Miyuki Kubo and Mitsugu Hanabusa, "Fabrication of microlenses by laser chemical vapor deposition," Appl. Opt. 29, 2755-2759 (1990)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. M. Oikawa, K. Iga, T. Sanada, N. Yamamoto, K. Nishizawa, “Array of Distributed-Index Planar Micro-Lenses Prepared from Ion Exchange Technique,” Jpn. J. Appl. Phys. 20, L296–L298 (1981). [CrossRef]
  2. M. Oikawa, K. Iga, T. Sanada, “Distributed-Index Planar Microlens Array Prepared from Deep Electromigration,” Electron. Lett. 17, 452–454 (1981). [CrossRef]
  3. M. Oikawa, K. Iga, “Distributed-Index Planar Microlens,” Appl. Opt. 21, 1052–1056 (1982). [CrossRef] [PubMed]
  4. H. Sugiyama, M. Kato, S. Misawa, K. Iga, “Fabrication of Planar Microlens by Transverse Electromigration Method,” Jpn. J. Appl. Phys. 25, 1959–1960 (1986). [CrossRef]
  5. N. F. Borrelli, D. L. Morse, R. H. Bellman, W. L. Morgan, “Photolytic Technique for Producing Microlenses in Photosensitive Glass,” Appl. Opt. 24, 2520–2525 (1985). [CrossRef] [PubMed]
  6. N. F. Borrelli, D. L. Morse, “Microlens Arrays Produced by a Photolytic Technique,” Appl. Opt. 27, 476–479 (1988). [CrossRef] [PubMed]
  7. K. S. Lee, F. S. Barnes, “Microlenses on the End of Single-Optical Fibers for Laser Applications,” Appl. Opt. 24, mode 3134–3139 (1985). [CrossRef] [PubMed]
  8. G. D. Khoe, H. G. Kock, J. A. Luijendijk, G. H. J. van den Brekel, D. Kuppers, “Plasma CVD Prepared SiO2/Si3N4 Graded Index Lenses Integrated in Windows of Laser Diode Packages,” in Technical Digest, Seventh European Conference on Optical Communications (Copenhagen, 1981), paper 7.6-1.
  9. A. Sugimura, Y. Fukuda, M. Hanabusa, “Selective Area Deposition of Silicon-nitride and Silicon-oxide by Laser Chemical Vapor Deposition and Fabrication of Microlenses,” J. Appl. Phys. 62, 3222–3227 (1987). [CrossRef]
  10. M. J. Rand, J. F. Roberts, “Silicon Oxynitride Films from the Reaction,” J. Electrochem. Soc.: Solid-State NO-NH3-SiH4 Sci. Technol 120, 446–453 (1973).
  11. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975) pp. 468–469.
  12. See, for example, M. Hanabusa, “Photoinduced Deposition of Thin Films,” Mater. Sci. Rep. 2, 51–98 (1987). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited