We present a method of determining optical constants n and k of a thin film using only the reflectance R(ω) curve (normal incidence reflectance spectroscopy). The method is based on the simultaneous use of Fresnel laws and dispersion relations between n and k of the film, via an iterative process. To illustrate the method, optical constants in the VUV of a film grown on InP were determined. A second example with a SnO2 film shows how the method can reduce the effect of experimental errors when two sets of spectroscopic data are available.
© 1990 Optical Society of America
Original Manuscript: May 12, 1989
Published: August 1, 1990
G. Lévêque and Y. Villachon-Renard, "Determination of optical constants of thin film from reflectance spectra," Appl. Opt. 29, 3207-3212 (1990)