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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 22 — Aug. 1, 1990
  • pp: 3280–3285

Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry

Katsuyuki Okada, Hironobu Sakuta, Teruji Ose, and Jumpei Tsujiuchi  »View Author Affiliations


Applied Optics, Vol. 29, Issue 22, pp. 3280-3285 (1990)
http://dx.doi.org/10.1364/AO.29.003280


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Abstract

A phase shifting interferometer using a tunable laser as a light source is proposed for measuring shapes of both surfaces of a glass plate and the distribution of refractive index. To separate the superimposed interferograms generated with many wavefronts reflected from the plate, the phase shift associated with the wavelength shift is applied in the phase shifting interferometer with unequal optical paths in testing and reference beams. A laser diode is used for the tunable light source, and the data processing for obtaining phase distribution is based on the least-squares fitting in interferograms. The rms errors of the measurements are <1/50 wavelength for the surface shape, and 10−5 of the refractive index for a 5-mm thick optical glass plate.

© 1990 Optical Society of America

History
Original Manuscript: December 29, 1988
Published: August 1, 1990

Citation
Katsuyuki Okada, Hironobu Sakuta, Teruji Ose, and Jumpei Tsujiuchi, "Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry," Appl. Opt. 29, 3280-3285 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-22-3280


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References

  1. Y. Ishii, J. Chen, K. Murata, “Digital Phase-Measureing Interferometry with a Tunable Laser Diode,” Opt. Lett. 12, 233–235 (1987). [CrossRef] [PubMed]
  2. A. Valentin, C. Nicolas, L. Henry, A. W. Mantz, “Tunable Diode Laser Control by a Stepping Michelson Interferometer,” Appl. Opt. 26, 41–46 (1987). [CrossRef] [PubMed]
  3. K. Tatsuno, Y. Tsunoda, “Diode Laser Direct Modulation Heterodyne Interferometer,” Appl. Opt. 26, 37–40 (1987). [CrossRef] [PubMed]
  4. J. Chen, Y. Ishii, M. Murata, “Heterodyne Interferometry with a Frequency-Modulated Laser Diode,” Appl. Opt. 27, 124–128 (1988). [CrossRef] [PubMed]
  5. J. E. Greivenkamp, “Generalized Data Reduction for Heterodyne Interferometry,” Opt. Eng. 23, 350–352 (1984). [CrossRef]
  6. K. Okada, J. Tujiuchi, “Wavelength Scanning Interferometry for the Measurement of Both Surface Shapes and Refractive Index Inhomogeneity,” Proc. Soc. Photo-Opt. Instrum. Eng. 1162, 395–401 (1989).
  7. K. Okada, J. Tsujiuchi, “Error Analysis on the Phase Calculation from Superposed Interferograms Generated by a Wavelength Scanning Interferometer,” Opt. Commun.76, (1990), in press.

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