Peak reflectivity measurements of W/C, Mo/Si, and Mo/B4C multilayer mirrors have been performed using line and synchrotron radiation in the 8–190 Å wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. Mo/B4C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 Å and bandpasses as small as 3 Å.
© 1990 Optical Society of America
Andrew P. Zwicker, Sean P. Regan, Michael Finkenthal, H. Warren Moos, Ed B. Saloman, Richard Watts, and James R. Roberts, "Peak reflectivity measurements of W/C, Mo/Si, and Mo/B4C multilayer mirrors in the 8–190-Å range using both Kα line and synchrotron radiation," Appl. Opt. 29, 3694-3698 (1990)