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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 26 — Sep. 10, 1990
  • pp: 3775–3783

Mirau correlation microscope

Gordon S. Kino and Stanley S. C. Chim  »View Author Affiliations


Applied Optics, Vol. 29, Issue 26, pp. 3775-3783 (1990)
http://dx.doi.org/10.1364/AO.29.003775


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Abstract

We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter. This microscope provides the amplitude and phase information for the reflected signal from a sample located on the microscope–object plane. The device is remarkably insensitive to vibrations and is self-correcting for spherical and chromatic range aberrations of the objective. An imaging theory for the correlation microscope has been derived, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector. The range resolution is slightly better than that for a scanning optical microscope using a lens with the same aperture.

© 1990 Optical Society of America

History
Original Manuscript: December 19, 1989
Published: September 10, 1990

Citation
Gordon S. Kino and Stanley S. C. Chim, "Mirau correlation microscope," Appl. Opt. 29, 3775-3783 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-26-3775

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