We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter. This microscope provides the amplitude and phase information for the reflected signal from a sample located on the microscope–object plane. The device is remarkably insensitive to vibrations and is self-correcting for spherical and chromatic range aberrations of the objective. An imaging theory for the correlation microscope has been derived, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector. The range resolution is slightly better than that for a scanning optical microscope using a lens with the same aperture.
© 1990 Optical Society of America
Original Manuscript: December 19, 1989
Published: September 10, 1990
Gordon S. Kino and Stanley S. C. Chim, "Mirau correlation microscope," Appl. Opt. 29, 3775-3783 (1990)