OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 27 — Sep. 20, 1990
  • pp: 3880–3882

Polyimide optical waveguides fabricated with electron beam lithography

M. J. Rooks, H. V. Roussell, and L. M. Johnson  »View Author Affiliations


Applied Optics, Vol. 29, Issue 27, pp. 3880-3882 (1990)
http://dx.doi.org/10.1364/AO.29.003880


View Full Text Article

Enhanced HTML    Acrobat PDF (810 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Fabrication of PMMA clad polyimide waveguides by electron beam lithography creates very smooth sidewalls allowing production of narrow low loss waveguides on planar substrates.

© 1990 Optical Society of America

History
Original Manuscript: December 4, 1989
Published: September 20, 1990

Citation
M. J. Rooks, H. V. Roussell, and L. M. Johnson, "Polyimide optical waveguides fabricated with electron beam lithography," Appl. Opt. 29, 3880-3882 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-27-3880


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. R. Selvaraj, H. T. Lin, J. F. McDonald, “Integrated Optical Waveguides in Polyimide for Wafer Scale Integration,” IEEE/OSA J. Lightwave Technol. LT-6, 1034–1044 (1988). [CrossRef]
  2. D. A. Christensen, “Plasma-Etched Polymer Waveguides for Intrachip Optical Interconnects,” Proc. Soc. Photo-Opt. Instrum. Eng. 836, 359–363.
  3. T. Kurokawa, N. Takato, Y. Katayama, “Polymer Optical Circuits for Multimode Optical Fiber Systems,” Appl. Opt. 19, 3124–3129 (1980). [CrossRef] [PubMed]
  4. D. H. Hartman, G. R. Lalk, J. W. Howse, R. R. Krchnavek, “Radiant Cured Polymer Optical Waveguides on Printed Circuit Boards for Photonic Interconnection Use,” Appl. Opt. 28, 40–47 (1989). [CrossRef] [PubMed]
  5. D. H. Hartman, “Digital High Speed Interconnects: a Study of the Optical Alternative,” Opt. Eng. 25, 1086–1102 (1986). [CrossRef]
  6. P. R. Haugen, S. Rychnovsky, A. Husain, L. D. Hutcheson, “Optical Interconnects for High Speed Computing,” Opt. Eng. 25, 1076–1085 (1986). [CrossRef]
  7. M. R. Feldman, S. C. Esener, C. C. Guest, S. H. Lee, “Comparison Between Optical and Electrical Interconnects Based on Power and Speed Considerations,” Appl. Opt. 27, 1742–1751 (1988). [CrossRef] [PubMed]
  8. J. A. Fried, “Optical I/O for High Speed CMOS Systems,” Opt. Eng. 25, 1132–1141 (1986). [CrossRef]
  9. L. A. Hornak, “Optical Interconnections for Wafer-Scale Integrated and Hybrid-Wafer-Scale Integrated Architectures,” Proc. Soc. Photo-Opt. Instrum. Eng. 835, 322–327 (1987).
  10. D. E. Craley, L. R. Megargel, M. A. Mentzer, D. H. Naghski, “Interconnects for VHSIC Packaging,” Proc. Soc. Photo-Opt. Instrum. Eng. 85, 328–336 (1987).
  11. L. D. Hutcheson, P. Haugen, “Optical Interconnects Replace Hardwire,” IEEE Spectrum, 30–35 (Mar.1987).
  12. D. Z. Tsang, D. L. Smythe, A. Chu, J. J. Lambert, “A Technology for Optical Interconnections Based on Multichip Integration,” Opt. Eng. 25, 1127–1131 (1986). [CrossRef]
  13. C. T. Sullivan, M. C. Roth, T. Budzynski, “Integrated Optics Approach for High-Density Optical Interconnections in High-Speed Multichip IC Packages,” Proc. Soc. Photo-Opt. Instrum. Eng. 836, 343–350 (1987).
  14. M. Kobayashi, M. Yamada, Y. Yamada, A. Himeno, H. Terui, “Guided-Wave Optical Chip-to-Chip Interconnections,” Electron. lett. 23, 143–144 (1987). [CrossRef]
  15. E. E. E. Frietman, W. van Nifterick, “Optoelectronic ICS for High-Speed Parallel Processing,” Lasers Optron.69–71 (Aug.1987).
  16. H. Franke, J. D. Crow, “Optical Waveguiding in Polyimide,” Proc. Soc. Photo-Opt. Instrum. Eng. 651, 102–107 (1986).
  17. P. K. Tien, “Light Waves in Thin Films and Integrated Optics,” Appl. Opt. 10, 2395–2413 (1971). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited