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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 27 — Sep. 20, 1990
  • pp: 3934–3937

Flat microwave-powered ultraviolet source

Tetsuo Ono and Seiichi Murayama  »View Author Affiliations


Applied Optics, Vol. 29, Issue 27, pp. 3934-3937 (1990)
http://dx.doi.org/10.1364/AO.29.003934


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Abstract

A microwave-powered ultraviolet source capable of covering an area as large as a 150-mm Si wafer is developed. Fifteen low pressure mercury discharge lamps are arrayed in a flat microwave cavity. The Hg 254-nm irradiance on the surface 1 cm from the lamps is 120 mW/cm2 at a microwave power of 1200 W. This UV source is used for photoresist removal. Low pressure cadmium lamps, which have the Cd 229-nm irradiance of 13.9 mW/cm2 at 1 cm for a 500-W input, are also investigated.

© 1990 Optical Society of America

History
Original Manuscript: August 9, 1989
Published: September 20, 1990

Citation
Tetsuo Ono and Seiichi Murayama, "Flat microwave-powered ultraviolet source," Appl. Opt. 29, 3934-3937 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-27-3934

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