A microwave-powered ultraviolet source capable of covering an area as large as a 150-mm Si wafer is developed. Fifteen low pressure mercury discharge lamps are arrayed in a flat microwave cavity. The Hg 254-nm irradiance on the surface 1 cm from the lamps is 120 mW/cm2 at a microwave power of 1200 W. This UV source is used for photoresist removal. Low pressure cadmium lamps, which have the Cd 229-nm irradiance of 13.9 mW/cm2 at 1 cm for a 500-W input, are also investigated.
© 1990 Optical Society of America
Original Manuscript: August 9, 1989
Published: September 20, 1990
Tetsuo Ono and Seiichi Murayama, "Flat microwave-powered ultraviolet source," Appl. Opt. 29, 3934-3937 (1990)