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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 28 — Oct. 1, 1990
  • pp: 4303–4309

Coatings for optical applications produced by ion beam sputter deposition

Jurgen Becker and Volker Scheuer  »View Author Affiliations


Applied Optics, Vol. 29, Issue 28, pp. 4303-4309 (1990)
http://dx.doi.org/10.1364/AO.29.004303


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Abstract

Ion beam sputter deposition (IBSD) is a useful technique for producing high performance optical coatings. It is possible with relatively simple methods to get a reasonable deposition rate over a sufficiently large area. However, thin films produced with this coating method had a relatively high amount of contaminants. The contaminants were analyzed by various techniques mainly by total reflection x-ray fluorescence. The influence of the contaminants on the performance of the optical coatings proved to be surprisingly low. Optical properties were investigated, mainly the refractive index, the absorption coefficient at 0.514 μm, the scattering behavior, and the damage threshold against high-power laser pulses at 1.06 μm.

© 1990 Optical Society of America

History
Original Manuscript: August 4, 1989
Published: October 1, 1990

Citation
Jurgen Becker and Volker Scheuer, "Coatings for optical applications produced by ion beam sputter deposition," Appl. Opt. 29, 4303-4309 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-28-4303

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