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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 28 — Oct. 1, 1990
  • pp: 4310–4313

Low-optical-loss glass thin films

Mool C. Gupta  »View Author Affiliations


Applied Optics, Vol. 29, Issue 28, pp. 4310-4313 (1990)
http://dx.doi.org/10.1364/AO.29.004310


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Abstract

Low-optical-loss glass thin films have been prepared using sputtering and electron beam deposition methods. Results of film composition and optical property measurements are presented. Glass films have been prepared with optical loss values of 0.5 dB/cm. We discuss factors limiting the reduction in optical loss for sputtered and vapor-deposited films. These films can be easily patterned using standard photolithographic processes for fabrication of integrated optics components, such as grating couplers and planar lenses.

© 1990 Optical Society of America

History
Original Manuscript: September 18, 1989
Published: October 1, 1990

Citation
Mool C. Gupta, "Low-optical-loss glass thin films," Appl. Opt. 29, 4310-4313 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-28-4310


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References

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