Low-optical-loss glass thin films have been prepared using sputtering and electron beam deposition methods. Results of film composition and optical property measurements are presented. Glass films have been prepared with optical loss values of 0.5 dB/cm. We discuss factors limiting the reduction in optical loss for sputtered and vapor-deposited films. These films can be easily patterned using standard photolithographic processes for fabrication of integrated optics components, such as grating couplers and planar lenses.
© 1990 Optical Society of America
Mool C. Gupta, "Low-optical-loss glass thin films," Appl. Opt. 29, 4310-4313 (1990)