OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 28 — Oct. 1, 1990
  • pp: 4310–4313

Low-optical-loss glass thin films

Mool C. Gupta  »View Author Affiliations


Applied Optics, Vol. 29, Issue 28, pp. 4310-4313 (1990)
http://dx.doi.org/10.1364/AO.29.004310


View Full Text Article

Enhanced HTML    Acrobat PDF (729 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Low-optical-loss glass thin films have been prepared using sputtering and electron beam deposition methods. Results of film composition and optical property measurements are presented. Glass films have been prepared with optical loss values of 0.5 dB/cm. We discuss factors limiting the reduction in optical loss for sputtered and vapor-deposited films. These films can be easily patterned using standard photolithographic processes for fabrication of integrated optics components, such as grating couplers and planar lenses.

© 1990 Optical Society of America

History
Original Manuscript: September 18, 1989
Published: October 1, 1990

Citation
Mool C. Gupta, "Low-optical-loss glass thin films," Appl. Opt. 29, 4310-4313 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-28-4310

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited