A technique to measure the spectral distribution in a cross section of a KrF laser beam is described. Two-dimensional distribution, pulse-by-pulse fluctuation, and long term variation of the spectrum of the laser beam are measured with this method.
© 1990 Optical Society of America
Original Manuscript: November 28, 1989
Published: October 20, 1990
Takashi Yagi and Kei Ohta, "Fabry-Perot measurement of 2-D spectral distribution in a KrF laser beam," Appl. Opt. 29, 4504-4509 (1990)