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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 31 — Nov. 1, 1990
  • pp: 4529–4531

Performance of multilayer coated diffraction gratings in the EUV

Ritva A. M. Keski-Kuha, Roger J. Thomas, Jeffrey S. Gum, and Charles E. Condor  »View Author Affiliations


Applied Optics, Vol. 29, Issue 31, pp. 4529-4531 (1990)
http://dx.doi.org/10.1364/AO.29.004529


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Abstract

Performance of multilayer coated diffraction gratings has been evaluated in the extreme UV. The application of multilayer coatings to two blazed gratings has produced a significant enhancement in grating efficiency in the 300-Å spectral region in first order.

© 1990 Optical Society of America

History
Original Manuscript: May 22, 1990
Published: November 1, 1990

Citation
Ritva A. M. Keski-Kuha, Roger J. Thomas, Jeffrey S. Gum, and Charles E. Condor, "Performance of multilayer coated diffraction gratings in the EUV," Appl. Opt. 29, 4529-4531 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-31-4529

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