Performance of multilayer coated diffraction gratings has been evaluated in the extreme UV. The application of multilayer coatings to two blazed gratings has produced a significant enhancement in grating efficiency in the 300-Å spectral region in first order.
Ritva A. M. Keski-Kuha, Roger J. Thomas, Jeffrey S. Gum, and Charles E. Condor, "Performance of multilayer coated diffraction gratings in the EUV," Appl. Opt. 29, 4529-4531 (1990)