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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 31 — Nov. 1, 1990
  • pp: 4614–4617

Interferometric alignment using parabolic and off-axis conical zone plates

Zbigniew Jaroszewicz, Vicente Moreno, and Salvador Bara  »View Author Affiliations


Applied Optics, Vol. 29, Issue 31, pp. 4614-4617 (1990)
http://dx.doi.org/10.1364/AO.29.004614


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Abstract

The use of zone plates in optical alignment and displacement measurement is discussed. A simple theory of positioning using two coherent wavefronts is proposed. A few examples, already described in the literature as well as new ones, are presented as an illustration of the theory. The application of the specific case of the off-axis cylindrical zone plate (so-called parabolic zone plate) and off-axis conical zone plate for sensing the motion along a straight line parallel and inclined to the hologram plane is established. There are also adduced results of simple experiments supporting the analysis.

© 1990 Optical Society of America

History
Original Manuscript: February 3, 1989
Published: November 1, 1990

Citation
Zbigniew Jaroszewicz, Vicente Moreno, and Salvador Bara, "Interferometric alignment using parabolic and off-axis conical zone plates," Appl. Opt. 29, 4614-4617 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-31-4614


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References

  1. G. Makosch, F. J. Schoenes, “Interferometric Method for Checking the Mask Alignment Precision in the Lithographic Process,” Appl. Opt. 23, 628–632 (1984). [CrossRef] [PubMed]
  2. G. T. Olaru, T. Asakura, “Moire Alignment and Positioning Using a Synthetic Fresnel Zone Plate,” Opt. Commun. 54, 327–332 (1985). [CrossRef]
  3. R. F. Stevens, “Zone-Plate Interferometers,” J. Mod. Opt. 35, 75–79 (1988). [CrossRef]
  4. V. Moreno, M. V. Perez, S. Bara, C. Gomez-Reino, “Interferometric Alignment by a Circular Zone Plate,” Proc. Soc. Photo-Opt. Instrum. Eng. 952, 367–370 (1989).
  5. T. R. Welberry, R. P. Williams, “On Certain Non-Circular Zone Plates,” Opt. Acta 23, 237–000 (1976). [CrossRef]
  6. M. V. Perez, C. Gomez-Reino, S. Bara, “Holographically Produced Parabolic Zone Plates,” Opt. Eng. 26, 461–466 (1987). [CrossRef]
  7. C. Frere, D. Leseberg, O. Bryngdahl, “Computer-Generated Holograms of Three-Dimensional Objects Composed of Line Segments,” J. Opt. Soc. Am. A 3, 726–730 (1986). [CrossRef]
  8. Z. Jaroszewicz, “Conical Zone Plate,” Opt. Commun. 66, 9–14 (1988). [CrossRef]

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