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Applied Optics

Applied Optics


  • Vol. 29, Iss. 31 — Nov. 1, 1990
  • pp: 4614–4617

Interferometric alignment using parabolic and off-axis conical zone plates

Zbigniew Jaroszewicz, Vicente Moreno, and Salvador Bara  »View Author Affiliations

Applied Optics, Vol. 29, Issue 31, pp. 4614-4617 (1990)

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The use of zone plates in optical alignment and displacement measurement is discussed. A simple theory of positioning using two coherent wavefronts is proposed. A few examples, already described in the literature as well as new ones, are presented as an illustration of the theory. The application of the specific case of the off-axis cylindrical zone plate (so-called parabolic zone plate) and off-axis conical zone plate for sensing the motion along a straight line parallel and inclined to the hologram plane is established. There are also adduced results of simple experiments supporting the analysis.

© 1990 Optical Society of America

Original Manuscript: February 3, 1989
Published: November 1, 1990

Zbigniew Jaroszewicz, Vicente Moreno, and Salvador Bara, "Interferometric alignment using parabolic and off-axis conical zone plates," Appl. Opt. 29, 4614-4617 (1990)

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  1. G. Makosch, F. J. Schoenes, “Interferometric Method for Checking the Mask Alignment Precision in the Lithographic Process,” Appl. Opt. 23, 628–632 (1984). [CrossRef] [PubMed]
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