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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 31 — Nov. 1, 1990
  • pp: 4705–4714

Use of objective lenses with slit pupil functions in the imaging of line structures

Tony Wilson, S. J. Hewlett, and C. J. R. Sheppard  »View Author Affiliations


Applied Optics, Vol. 29, Issue 31, pp. 4705-4714 (1990)
http://dx.doi.org/10.1364/AO.29.004705


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Abstract

We consider the imaging of line structures in confocal imaging systems and show that some advantages result if we employ a slit pupil function in one of the lenses. As an example it is found that the gradient of the image of a straightedge is 17.8% sharper than in a traditional confocal microscope. Another attraction is that theoretical imaging calculations are often possible in terms of simple analytic functions. Experimental results and images are presented which are compared with traditional confocal systems as well as those employing incoherent slit detectors.

© 1990 Optical Society of America

History
Original Manuscript: November 14, 1989
Published: November 1, 1990

Citation
Tony Wilson, S. J. Hewlett, and C. J. R. Sheppard, "Use of objective lenses with slit pupil functions in the imaging of line structures," Appl. Opt. 29, 4705-4714 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-31-4705


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References

  1. M. Minsky, “Microscopy Apparatus,” U.S. Patent3,013,467 (1961).
  2. T. Wilson, C. J. R. Sheppard, Theory and Practice of Scanning Optical Microscopy (Academic, London, 1984).
  3. T. Wilson, S. J. Hewlett, “Coherent Detection in Scanning Microscopes,” Inst. Phys. Conf. Ser. 98, 629–632, (1989).
  4. C. J. R. Sheppard, X. Q. Mao, “Confocal Microscopes with Slit Apertures,” J. Mod. Opt. 35, 1169–1185 (1988). [CrossRef]
  5. T. Wilson, S. J. Hewlett, “Imaging in Scanning Microsopes with Slit-Shaped Detectors,” J. Microsc. (In Press) (1990). [CrossRef] [PubMed]
  6. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975).
  7. M. Abramowitz, I. A. Stegun, Eds., Handbook of Mathematical Functions (Dover, New York, 1965).
  8. D. Nyyssonen, “Linewidth Measurement with an Optical Microscope: the Effect of Operating Conditions on the Image Profile,” Appl. Opt. 16, 2223–2230 (1977). [CrossRef] [PubMed]
  9. T. Wilson, S. J. Hewlett, “The Use of Annular Pupil Plane Filters to Tune the Imaging Properties in Confocal Microsocpy,” J. Mod. Opt. (1990); in press. [CrossRef]
  10. T. Wilson, D. K. Hamilton, “Dynamic Focusing in the Confocal Scanning Microscope,” J. Microsc. Part 2 128, 139–143 (1982).

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