Attention is called to an optical linewidth measurement procedure based on diffraction imagery by a polarizing microscope with crossed polarizers.
© 1990 Optical Society of America
Original Manuscript: December 19, 1989
Published: December 1, 1990
Richard Barakat, "Optical linewidth measurements using a polarizing microscope with crossed polarizers," Appl. Opt. 29, 5038-5039 (1990)