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Applied Optics

Applied Optics


  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5069–5073

Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances

Tami Kihara and Kiyoshi Yokomori  »View Author Affiliations

Applied Optics, Vol. 29, Issue 34, pp. 5069-5073 (1990)

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A new technique to obtain the refractive index and thickness of a thin film simultaneously is presented. The of p-polarized light and s-polarized light are measured at various angles of incidence, and by a reflectances numerical procedure the film index and thickness are extracted from the measured reflectances. The and numerical procedure are simple, and the values obtained are accurate. As an example, we measurements made measurements on a single layer film (SiO2/Si) and a double layer film (SiON/SiO2/Si) and confirmed that the values obtained were consistent.

© 1990 Optical Society of America

Original Manuscript: November 11, 1989
Published: December 1, 1990

Tami Kihara and Kiyoshi Yokomori, "Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances," Appl. Opt. 29, 5069-5073 (1990)

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