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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5103–5105

Fabrication of aberration-free focusing grating couplers

Fumihiro Sogawa, Yoshikazu Hori, and Makoto Kato  »View Author Affiliations


Applied Optics, Vol. 29, Issue 34, pp. 5103-5105 (1990)
http://dx.doi.org/10.1364/AO.29.005103


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Abstract

An almost aberration-free focusing grating coupler with a grating area of 1 × 1 mm2 and a 2-mm focal length was made by using an electron beam writing system with accurately calibrated electron beam deflection and an accurate parameter setting of the effective refractive index of the waveguide. The smallest focused spot size achieved was 1.2 μm (FWHM), which is 1.06 times the value of the diffraction-limited spot size.

© 1990 Optical Society of America

History
Original Manuscript: November 15, 1989
Published: December 1, 1990

Citation
Fumihiro Sogawa, Yoshikazu Hori, and Makoto Kato, "Fabrication of aberration-free focusing grating couplers," Appl. Opt. 29, 5103-5105 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-34-5103


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References

  1. S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986). [CrossRef]
  2. D. Heitmann, C. Ortiz, “Calculation and Experimental Verification of Two-Dimensional Focusing Grating Couplers,” IEEE J. Quantum Electron. QE-17, 1257–1263 (1981). [CrossRef]
  3. T. Suhara, H. Nishihara, J. Koyama, “High Performance Focusing Grating Coupler Fabricated by Electron-Beam Writing,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, DC, 1984), paper THD4.
  4. Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.
  5. T. Suhara, H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron. QE-22, 845–867 (1986). [CrossRef]
  6. S. Ura, T. Suhara, H. Nishihara, “Aberration Characterizations of a Focusing Grating Coupler in an Integrated-Optic Disk Pickup Device,” Appl. Opt. 26, 4777–4782 (1987). [CrossRef] [PubMed]

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