A micro-Fresnel lens replication method by inorganic material deposition has been developed. A ZnS micro-Fresnel lens and a completely flat micro-Fresnel lens have been made by this method. The ZnS micro-Fresnel lens stability characteristics are improved for temperature, humidity, and focusing. Furthermore, higher resolution in electron-beam lithography is made possible by lens thickness reduction. The completely flat micro-Fresnel lens is a new device and improves integration performance. This lens can be applied to stacked planar optics devices for use in the construction of 3-D optical circuits.
© 1990 Optical Society of America
Hayami Hosokawa and Tsukasa Yamashita, "ZnS micro-Fresnel lens and its uses," Appl. Opt. 29, 5106-5110 (1990)