OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5111–5114

Fabrication of holographic microlenses using a deep UV lithographed zone plate

Hai Ming, Yongan Wu, Jianping Xie, and Toshinori Nakajima  »View Author Affiliations


Applied Optics, Vol. 29, Issue 34, pp. 5111-5114 (1990)
http://dx.doi.org/10.1364/AO.29.005111


View Full Text Article

Enhanced HTML    Acrobat PDF (754 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Holographic microlens arrays and elliptical zone plates are fabricated on holographic plates and photoresists by interference between the first- and second-order diffracted waves from an ion etched Fresnel zone plate, which is made by electron-beam scanning and deep UV lithography. This method of fabrication is simple, and a holographic lens with a large numerical aperture and short focal length is obtained. Experimental results of focusing and imaging by a lens array and an elliptical zone plate are given. Two methods of fabricating holographic zone plates for an IR or UV wavelength are also proposed.

© 1990 Optical Society of America

History
Original Manuscript: November 20, 1989
Published: December 1, 1990

Citation
Hai Ming, Yongan Wu, Jianping Xie, and Toshinori Nakajima, "Fabrication of holographic microlenses using a deep UV lithographed zone plate," Appl. Opt. 29, 5111-5114 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-34-5111

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited