Holographic microlens arrays and elliptical zone plates are fabricated on holographic plates and photoresists by interference between the first- and second-order diffracted waves from an ion etched Fresnel zone plate, which is made by electron-beam scanning and deep UV lithography. This method of fabrication is simple, and a holographic lens with a large numerical aperture and short focal length is obtained. Experimental results of focusing and imaging by a lens array and an elliptical zone plate are given. Two methods of fabricating holographic zone plates for an IR or UV wavelength are also proposed.
© 1990 Optical Society of America
Original Manuscript: November 20, 1989
Published: December 1, 1990
Hai Ming, Yongan Wu, Jianping Xie, and Toshinori Nakajima, "Fabrication of holographic microlenses using a deep UV lithographed zone plate," Appl. Opt. 29, 5111-5114 (1990)