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Applied Optics

Applied Optics


  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5111–5114

Fabrication of holographic microlenses using a deep UV lithographed zone plate

Hai Ming, Yongan Wu, Jianping Xie, and Toshinori Nakajima  »View Author Affiliations

Applied Optics, Vol. 29, Issue 34, pp. 5111-5114 (1990)

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Holographic microlens arrays and elliptical zone plates are fabricated on holographic plates and photoresists by interference between the first- and second-order diffracted waves from an ion etched Fresnel zone plate, which is made by electron-beam scanning and deep UV lithography. This method of fabrication is simple, and a holographic lens with a large numerical aperture and short focal length is obtained. Experimental results of focusing and imaging by a lens array and an elliptical zone plate are given. Two methods of fabricating holographic zone plates for an IR or UV wavelength are also proposed.

© 1990 Optical Society of America

Original Manuscript: November 20, 1989
Published: December 1, 1990

Hai Ming, Yongan Wu, Jianping Xie, and Toshinori Nakajima, "Fabrication of holographic microlenses using a deep UV lithographed zone plate," Appl. Opt. 29, 5111-5114 (1990)

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