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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5120–5126

Laser beam lithographed micro-Fresnel lenses

Masamitsu Haruna, Masanobu Takahashi, Kohji Wakahayashi, and Hiroshi Nishihara  »View Author Affiliations


Applied Optics, Vol. 29, Issue 34, pp. 5120-5126 (1990)
http://dx.doi.org/10.1364/AO.29.005120


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Abstract

Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.

© 1990 Optical Society of America

History
Original Manuscript: November 24, 1989
Published: December 1, 1990

Citation
Masamitsu Haruna, Masanobu Takahashi, Kohji Wakahayashi, and Hiroshi Nishihara, "Laser beam lithographed micro-Fresnel lenses," Appl. Opt. 29, 5120-5126 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-34-5120


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References

  1. T. Fujita, H. Nishihara, J. Koyama, “Fabrication of Micro Lenses Using Electron-Beam Lithography,” Opt. Lett. 6, 613–615 (1981). [CrossRef] [PubMed]
  2. T. Fujita, H. Nishihara, J. Koyama, “Blazed Gratings and Fresnel Lenses Fabricated by Electron-Beam Lithography,” Opt. Lett. 7, 578–580 (1982). [CrossRef] [PubMed]
  3. H. Nishihara, T. Suhara, “I. Micro Fresnel Lenses,” in Progress in Optics, Vol. 24, E. Wolf, Ed. (North-Holland, Amsterdam, 1987). [CrossRef]
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  6. M. Haruna, K. Kasazumi, H. Nishihara, “Integrated-Optic Differential Laser Doppler Velocimeter with a Micro Fresnel Lens Array,” in Technical Digest, Conference on Integrated and Guided-Wave Optics (1989), paper MBB4.
  7. T. Shiono, K. Setsune, O. Yamazaki, K. Wasa, “Rectangular-Apertured Micro-Fresnel Lens Arrays Fabricated by Electron-Beam Lithography,” Appl. Opt. 26, 587–591 (1987). [CrossRef] [PubMed]

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