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Applied Optics

Applied Optics


  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5120–5126

Laser beam lithographed micro-Fresnel lenses

Masamitsu Haruna, Masanobu Takahashi, Kohji Wakahayashi, and Hiroshi Nishihara  »View Author Affiliations

Applied Optics, Vol. 29, Issue 34, pp. 5120-5126 (1990)

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Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.

© 1990 Optical Society of America

Original Manuscript: November 24, 1989
Published: December 1, 1990

Masamitsu Haruna, Masanobu Takahashi, Kohji Wakahayashi, and Hiroshi Nishihara, "Laser beam lithographed micro-Fresnel lenses," Appl. Opt. 29, 5120-5126 (1990)

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